11/12/2010	12:00:27 AM	Helium valve closed
11/12/2010	12:00:27 AM	H2 valve closed
11/12/2010	12:00:27 AM	BCl3 valve closed
11/12/2010	12:00:27 AM	PH3 valve closed
11/12/2010	12:00:27 AM	SiCl4 pre valve closed
11/12/2010	12:00:27 AM	SiCl4 post valve closed
11/12/2010	12:00:27 AM	Bubbler valve closed
11/12/2010	12:00:27 AM	Main Vac valve opened
11/12/2010	12:00:27 AM	Bypass valve opened
11/12/2010	12:00:27 AM	Helium MFC set to  0.000000
11/12/2010	12:00:27 AM	H2 MFC set to  0.000000
11/12/2010	12:00:27 AM	BCl3 MFC set to  0.000000
11/12/2010	12:00:27 AM	PHl3 MFC set to  0.000000
11/12/2010	12:00:27 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:00:27 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:00:27 AM	Tube furnace set to 0
11/12/2010	12:01:27 AM	H2 valve closed
11/12/2010	12:01:27 AM	BCl3 valve closed
11/12/2010	12:01:27 AM	PH3 valve closed
11/12/2010	12:01:27 AM	SiCl4 pre valve closed
11/12/2010	12:01:27 AM	SiCl4 post valve closed
11/12/2010	12:01:27 AM	Bubbler valve closed
11/12/2010	12:01:27 AM	Helium valve opened
11/12/2010	12:01:27 AM	Main Vac valve opened
11/12/2010	12:01:27 AM	Bypass valve opened
11/12/2010	12:01:27 AM	Helium MFC set to  100.000000
11/12/2010	12:01:27 AM	H2 MFC set to  0.000000
11/12/2010	12:01:27 AM	BCl3 MFC set to  0.000000
11/12/2010	12:01:27 AM	PHl3 MFC set to  0.000000
11/12/2010	12:01:27 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:01:27 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:01:27 AM	Tube furnace set to 0
11/12/2010	12:02:27 AM	Helium valve closed
11/12/2010	12:02:27 AM	H2 valve closed
11/12/2010	12:02:27 AM	BCl3 valve closed
11/12/2010	12:02:27 AM	PH3 valve closed
11/12/2010	12:02:27 AM	SiCl4 pre valve closed
11/12/2010	12:02:27 AM	SiCl4 post valve closed
11/12/2010	12:02:27 AM	Bubbler valve closed
11/12/2010	12:02:27 AM	Main Vac valve opened
11/12/2010	12:02:27 AM	Bypass valve opened
11/12/2010	12:02:27 AM	Helium MFC set to  0.000000
11/12/2010	12:02:27 AM	H2 MFC set to  0.000000
11/12/2010	12:02:27 AM	BCl3 MFC set to  0.000000
11/12/2010	12:02:27 AM	PHl3 MFC set to  0.000000
11/12/2010	12:02:27 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:02:27 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:02:27 AM	Tube furnace set to 0
11/12/2010	12:03:27 AM	H2 valve closed
11/12/2010	12:03:27 AM	BCl3 valve closed
11/12/2010	12:03:27 AM	PH3 valve closed
11/12/2010	12:03:27 AM	SiCl4 pre valve closed
11/12/2010	12:03:27 AM	SiCl4 post valve closed
11/12/2010	12:03:27 AM	Bubbler valve closed
11/12/2010	12:03:27 AM	Helium valve opened
11/12/2010	12:03:27 AM	Main Vac valve opened
11/12/2010	12:03:27 AM	Bypass valve opened
11/12/2010	12:03:27 AM	Helium MFC set to  100.000000
11/12/2010	12:03:27 AM	H2 MFC set to  0.000000
11/12/2010	12:03:27 AM	BCl3 MFC set to  0.000000
11/12/2010	12:03:27 AM	PHl3 MFC set to  0.000000
11/12/2010	12:03:27 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:03:27 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:03:27 AM	Tube furnace set to 0
11/12/2010	12:04:27 AM	Helium valve closed
11/12/2010	12:04:27 AM	H2 valve closed
11/12/2010	12:04:27 AM	BCl3 valve closed
11/12/2010	12:04:27 AM	PH3 valve closed
11/12/2010	12:04:27 AM	SiCl4 pre valve closed
11/12/2010	12:04:27 AM	SiCl4 post valve closed
11/12/2010	12:04:27 AM	Bubbler valve closed
11/12/2010	12:04:27 AM	Main Vac valve opened
11/12/2010	12:04:27 AM	Bypass valve opened
11/12/2010	12:04:27 AM	Helium MFC set to  0.000000
11/12/2010	12:04:27 AM	H2 MFC set to  0.000000
11/12/2010	12:04:27 AM	BCl3 MFC set to  0.000000
11/12/2010	12:04:27 AM	PHl3 MFC set to  0.000000
11/12/2010	12:04:27 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:04:27 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:04:28 AM	Tube furnace set to 0
11/12/2010	12:05:28 AM	H2 valve closed
11/12/2010	12:05:28 AM	BCl3 valve closed
11/12/2010	12:05:28 AM	PH3 valve closed
11/12/2010	12:05:28 AM	SiCl4 pre valve closed
11/12/2010	12:05:28 AM	SiCl4 post valve closed
11/12/2010	12:05:28 AM	Bubbler valve closed
11/12/2010	12:05:28 AM	Helium valve opened
11/12/2010	12:05:28 AM	Main Vac valve opened
11/12/2010	12:05:28 AM	Bypass valve opened
11/12/2010	12:05:28 AM	Helium MFC set to  100.000000
11/12/2010	12:05:28 AM	H2 MFC set to  0.000000
11/12/2010	12:05:28 AM	BCl3 MFC set to  0.000000
11/12/2010	12:05:28 AM	PHl3 MFC set to  0.000000
11/12/2010	12:05:28 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:05:28 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:05:28 AM	Tube furnace set to 0
11/12/2010	12:06:28 AM	Helium valve closed
11/12/2010	12:06:28 AM	H2 valve closed
11/12/2010	12:06:28 AM	BCl3 valve closed
11/12/2010	12:06:28 AM	PH3 valve closed
11/12/2010	12:06:28 AM	SiCl4 pre valve closed
11/12/2010	12:06:28 AM	SiCl4 post valve closed
11/12/2010	12:06:28 AM	Bubbler valve closed
11/12/2010	12:06:28 AM	Main Vac valve opened
11/12/2010	12:06:28 AM	Bypass valve opened
11/12/2010	12:06:28 AM	Helium MFC set to  0.000000
11/12/2010	12:06:28 AM	H2 MFC set to  0.000000
11/12/2010	12:06:28 AM	BCl3 MFC set to  0.000000
11/12/2010	12:06:28 AM	PHl3 MFC set to  0.000000
11/12/2010	12:06:28 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:06:28 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:06:28 AM	Tube furnace set to 0
11/12/2010	12:07:28 AM	H2 valve closed
11/12/2010	12:07:28 AM	BCl3 valve closed
11/12/2010	12:07:28 AM	PH3 valve closed
11/12/2010	12:07:28 AM	SiCl4 pre valve closed
11/12/2010	12:07:28 AM	SiCl4 post valve closed
11/12/2010	12:07:28 AM	Bubbler valve closed
11/12/2010	12:07:28 AM	Helium valve opened
11/12/2010	12:07:28 AM	Main Vac valve opened
11/12/2010	12:07:28 AM	Bypass valve opened
11/12/2010	12:07:28 AM	Helium MFC set to  100.000000
11/12/2010	12:07:28 AM	H2 MFC set to  0.000000
11/12/2010	12:07:28 AM	BCl3 MFC set to  0.000000
11/12/2010	12:07:28 AM	PHl3 MFC set to  0.000000
11/12/2010	12:07:28 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:07:28 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:07:28 AM	Tube furnace set to 0
11/12/2010	12:08:28 AM	Helium valve closed
11/12/2010	12:08:28 AM	H2 valve closed
11/12/2010	12:08:28 AM	BCl3 valve closed
11/12/2010	12:08:28 AM	PH3 valve closed
11/12/2010	12:08:28 AM	SiCl4 pre valve closed
11/12/2010	12:08:28 AM	SiCl4 post valve closed
11/12/2010	12:08:28 AM	Bubbler valve closed
11/12/2010	12:08:28 AM	Main Vac valve opened
11/12/2010	12:08:28 AM	Bypass valve opened
11/12/2010	12:08:28 AM	Helium MFC set to  0.000000
11/12/2010	12:08:28 AM	H2 MFC set to  0.000000
11/12/2010	12:08:28 AM	BCl3 MFC set to  0.000000
11/12/2010	12:08:28 AM	PHl3 MFC set to  0.000000
11/12/2010	12:08:28 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:08:28 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:08:28 AM	Tube furnace set to 0
11/12/2010	12:09:28 AM	H2 valve closed
11/12/2010	12:09:28 AM	BCl3 valve closed
11/12/2010	12:09:28 AM	PH3 valve closed
11/12/2010	12:09:28 AM	SiCl4 pre valve closed
11/12/2010	12:09:28 AM	SiCl4 post valve closed
11/12/2010	12:09:28 AM	Bubbler valve closed
11/12/2010	12:09:28 AM	Helium valve opened
11/12/2010	12:09:28 AM	Main Vac valve opened
11/12/2010	12:09:28 AM	Bypass valve opened
11/12/2010	12:09:28 AM	Helium MFC set to  100.000000
11/12/2010	12:09:28 AM	H2 MFC set to  0.000000
11/12/2010	12:09:28 AM	BCl3 MFC set to  0.000000
11/12/2010	12:09:28 AM	PHl3 MFC set to  0.000000
11/12/2010	12:09:28 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:09:28 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:09:28 AM	Tube furnace set to 0
11/12/2010	12:10:29 AM	Helium valve closed
11/12/2010	12:10:29 AM	H2 valve closed
11/12/2010	12:10:29 AM	BCl3 valve closed
11/12/2010	12:10:29 AM	PH3 valve closed
11/12/2010	12:10:29 AM	SiCl4 pre valve closed
11/12/2010	12:10:29 AM	SiCl4 post valve closed
11/12/2010	12:10:29 AM	Bubbler valve closed
11/12/2010	12:10:29 AM	Main Vac valve opened
11/12/2010	12:10:29 AM	Bypass valve opened
11/12/2010	12:10:29 AM	Helium MFC set to  0.000000
11/12/2010	12:10:29 AM	H2 MFC set to  0.000000
11/12/2010	12:10:29 AM	BCl3 MFC set to  0.000000
11/12/2010	12:10:29 AM	PHl3 MFC set to  0.000000
11/12/2010	12:10:29 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:10:29 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:10:29 AM	Tube furnace set to 0
11/12/2010	12:10:30 AM	Run finished at 12:10 AM
11/12/2010	12:10:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	12:11:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2010	12:11:51 AM	Recipe started at 12:11 AM
11/12/2010	12:11:51 AM	Helium valve closed
11/12/2010	12:11:51 AM	H2 valve closed
11/12/2010	12:11:51 AM	BCl3 valve closed
11/12/2010	12:11:51 AM	PH3 valve closed
11/12/2010	12:11:51 AM	SiCl4 pre valve closed
11/12/2010	12:11:51 AM	SiCl4 post valve closed
11/12/2010	12:11:51 AM	Main Vac valve closed
11/12/2010	12:11:51 AM	Bubbler valve closed
11/12/2010	12:11:51 AM	Bypass valve opened
11/12/2010	12:11:51 AM	Helium MFC set to  0.000000
11/12/2010	12:11:51 AM	H2 MFC set to  0.000000
11/12/2010	12:11:51 AM	BCl3 MFC set to  0.000000
11/12/2010	12:11:51 AM	PHl3 MFC set to  0.000000
11/12/2010	12:11:51 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:11:51 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:11:51 AM	Tube furnace set to 0
11/12/2010	12:11:51 AM	Helium valve closed
11/12/2010	12:11:51 AM	H2 valve closed
11/12/2010	12:11:51 AM	BCl3 valve closed
11/12/2010	12:11:51 AM	PH3 valve closed
11/12/2010	12:11:51 AM	SiCl4 pre valve closed
11/12/2010	12:11:51 AM	SiCl4 post valve closed
11/12/2010	12:11:51 AM	Bubbler valve closed
11/12/2010	12:11:51 AM	Main Vac valve opened
11/12/2010	12:11:51 AM	Bypass valve opened
11/12/2010	12:11:51 AM	Helium MFC set to  0.000000
11/12/2010	12:11:51 AM	H2 MFC set to  0.000000
11/12/2010	12:11:51 AM	BCl3 MFC set to  0.000000
11/12/2010	12:11:51 AM	PHl3 MFC set to  0.000000
11/12/2010	12:11:51 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:11:51 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:11:52 AM	Tube furnace set to 0
11/12/2010	12:11:52 AM	Run finished at 12:11 AM
11/12/2010	12:11:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2010	12:12:29 AM	Recipe started at 12:12 AM
11/12/2010	12:12:29 AM	Helium valve closed
11/12/2010	12:12:29 AM	BCl3 valve closed
11/12/2010	12:12:29 AM	PH3 valve closed
11/12/2010	12:12:29 AM	SiCl4 pre valve closed
11/12/2010	12:12:29 AM	SiCl4 post valve closed
11/12/2010	12:12:29 AM	Main Vac valve closed
11/12/2010	12:12:29 AM	Bypass valve closed
11/12/2010	12:12:29 AM	Bubbler valve closed
11/12/2010	12:12:29 AM	H2 valve opened
11/12/2010	12:12:29 AM	Helium MFC set to  0.000000
11/12/2010	12:12:29 AM	H2 MFC set to  500.000000
11/12/2010	12:12:29 AM	BCl3 MFC set to  0.000000
11/12/2010	12:12:29 AM	PHl3 MFC set to  0.000000
11/12/2010	12:12:29 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:12:29 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:12:29 AM	Tube furnace set to 0
11/12/2010	12:13:51 AM	Helium valve closed
11/12/2010	12:13:51 AM	BCl3 valve closed
11/12/2010	12:13:51 AM	PH3 valve closed
11/12/2010	12:13:51 AM	SiCl4 pre valve closed
11/12/2010	12:13:51 AM	SiCl4 post valve closed
11/12/2010	12:13:51 AM	Main Vac valve closed
11/12/2010	12:13:51 AM	Bypass valve closed
11/12/2010	12:13:51 AM	H2 valve opened
11/12/2010	12:13:51 AM	Bubbler valve opened
11/12/2010	12:13:51 AM	Helium MFC set to  0.000000
11/12/2010	12:13:51 AM	H2 MFC set to  500.000000
11/12/2010	12:13:51 AM	BCl3 MFC set to  0.000000
11/12/2010	12:13:51 AM	PHl3 MFC set to  0.000000
11/12/2010	12:13:51 AM	SiCl4 MFC set to  0.000000
11/12/2010	12:13:51 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:13:51 AM	Tube furnace set to 1000
11/12/2010	12:33:51 AM	Helium valve closed
11/12/2010	12:33:51 AM	BCl3 valve closed
11/12/2010	12:33:51 AM	Main Vac valve closed
11/12/2010	12:33:51 AM	Bypass valve closed
11/12/2010	12:33:51 AM	H2 valve opened
11/12/2010	12:33:51 AM	PH3 valve opened
11/12/2010	12:33:51 AM	SiCl4 pre valve opened
11/12/2010	12:33:51 AM	SiCl4 post valve opened
11/12/2010	12:33:51 AM	Bubbler valve opened
11/12/2010	12:33:51 AM	Helium MFC set to  0.000000
11/12/2010	12:33:51 AM	H2 MFC set to  500.000000
11/12/2010	12:33:51 AM	BCl3 MFC set to  0.000000
11/12/2010	12:33:51 AM	PHl3 MFC set to  1.000000
11/12/2010	12:33:51 AM	SiCl4 MFC set to  50.000000
11/12/2010	12:33:51 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	12:33:51 AM	Tube furnace set to 1000
11/12/2010	1:03:51 AM	H2 valve closed
11/12/2010	1:03:51 AM	BCl3 valve closed
11/12/2010	1:03:51 AM	PH3 valve closed
11/12/2010	1:03:51 AM	SiCl4 pre valve closed
11/12/2010	1:03:51 AM	SiCl4 post valve closed
11/12/2010	1:03:51 AM	Main Vac valve closed
11/12/2010	1:03:51 AM	Bypass valve closed
11/12/2010	1:03:51 AM	Helium valve opened
11/12/2010	1:03:51 AM	Bubbler valve opened
11/12/2010	1:03:51 AM	Helium MFC set to  500.000000
11/12/2010	1:03:51 AM	H2 MFC set to  0.000000
11/12/2010	1:03:51 AM	BCl3 MFC set to  0.000000
11/12/2010	1:03:51 AM	PHl3 MFC set to  0.000000
11/12/2010	1:03:51 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:03:51 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:03:51 AM	Tube furnace set to 0
11/12/2010	1:23:51 AM	Helium valve closed
11/12/2010	1:23:51 AM	H2 valve closed
11/12/2010	1:23:51 AM	BCl3 valve closed
11/12/2010	1:23:51 AM	PH3 valve closed
11/12/2010	1:23:51 AM	SiCl4 pre valve closed
11/12/2010	1:23:51 AM	SiCl4 post valve closed
11/12/2010	1:23:51 AM	Main Vac valve closed
11/12/2010	1:23:51 AM	Bypass valve closed
11/12/2010	1:23:51 AM	Bubbler valve closed
11/12/2010	1:23:51 AM	Helium MFC set to  0.000000
11/12/2010	1:23:51 AM	H2 MFC set to  0.000000
11/12/2010	1:23:51 AM	BCl3 MFC set to  0.000000
11/12/2010	1:23:51 AM	PHl3 MFC set to  0.000000
11/12/2010	1:23:51 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:23:51 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:23:51 AM	Tube furnace set to 0
11/12/2010	1:23:52 AM	Run finished at 1:23 AM
11/12/2010	1:28:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2010	1:28:10 AM	Recipe started at 1:28 AM
11/12/2010	1:28:10 AM	Helium valve closed
11/12/2010	1:28:10 AM	H2 valve closed
11/12/2010	1:28:10 AM	BCl3 valve closed
11/12/2010	1:28:10 AM	PH3 valve closed
11/12/2010	1:28:10 AM	SiCl4 pre valve closed
11/12/2010	1:28:10 AM	SiCl4 post valve closed
11/12/2010	1:28:10 AM	Main Vac valve closed
11/12/2010	1:28:10 AM	Bubbler valve closed
11/12/2010	1:28:10 AM	Bypass valve opened
11/12/2010	1:28:10 AM	Helium MFC set to  0.000000
11/12/2010	1:28:10 AM	H2 MFC set to  0.000000
11/12/2010	1:28:10 AM	BCl3 MFC set to  0.000000
11/12/2010	1:28:10 AM	PHl3 MFC set to  0.000000
11/12/2010	1:28:10 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:28:10 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:28:10 AM	Tube furnace set to 0
11/12/2010	1:29:03 AM	Helium valve closed
11/12/2010	1:29:03 AM	H2 valve closed
11/12/2010	1:29:03 AM	BCl3 valve closed
11/12/2010	1:29:03 AM	PH3 valve closed
11/12/2010	1:29:03 AM	SiCl4 pre valve closed
11/12/2010	1:29:03 AM	SiCl4 post valve closed
11/12/2010	1:29:03 AM	Bubbler valve closed
11/12/2010	1:29:03 AM	Main Vac valve opened
11/12/2010	1:29:03 AM	Bypass valve opened
11/12/2010	1:29:03 AM	Helium MFC set to  0.000000
11/12/2010	1:29:03 AM	H2 MFC set to  0.000000
11/12/2010	1:29:03 AM	BCl3 MFC set to  0.000000
11/12/2010	1:29:03 AM	PHl3 MFC set to  0.000000
11/12/2010	1:29:03 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:29:03 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:29:03 AM	Tube furnace set to 0
11/12/2010	1:29:03 AM	Run finished at 1:29 AM
11/12/2010	1:29:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2010	1:29:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	1:29:54 AM	Recipe started at 1:29 AM
11/12/2010	1:29:54 AM	Helium valve closed
11/12/2010	1:29:54 AM	H2 valve closed
11/12/2010	1:29:54 AM	BCl3 valve closed
11/12/2010	1:29:54 AM	PH3 valve closed
11/12/2010	1:29:54 AM	SiCl4 pre valve closed
11/12/2010	1:29:54 AM	SiCl4 post valve closed
11/12/2010	1:29:54 AM	Main Vac valve closed
11/12/2010	1:29:54 AM	Bubbler valve closed
11/12/2010	1:29:54 AM	Bypass valve opened
11/12/2010	1:29:54 AM	Helium MFC set to  0.000000
11/12/2010	1:29:54 AM	H2 MFC set to  0.000000
11/12/2010	1:29:54 AM	BCl3 MFC set to  0.000000
11/12/2010	1:29:54 AM	PHl3 MFC set to  0.000000
11/12/2010	1:29:54 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:29:54 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:29:54 AM	Tube furnace set to 0
11/12/2010	1:29:55 AM	Helium valve closed
11/12/2010	1:29:55 AM	H2 valve closed
11/12/2010	1:29:55 AM	BCl3 valve closed
11/12/2010	1:29:55 AM	PH3 valve closed
11/12/2010	1:29:55 AM	SiCl4 pre valve closed
11/12/2010	1:29:55 AM	SiCl4 post valve closed
11/12/2010	1:29:55 AM	Bubbler valve closed
11/12/2010	1:29:55 AM	Main Vac valve opened
11/12/2010	1:29:55 AM	Bypass valve opened
11/12/2010	1:29:55 AM	Helium MFC set to  0.000000
11/12/2010	1:29:55 AM	H2 MFC set to  0.000000
11/12/2010	1:29:55 AM	BCl3 MFC set to  0.000000
11/12/2010	1:29:55 AM	PHl3 MFC set to  0.000000
11/12/2010	1:29:55 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:29:55 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:29:55 AM	Tube furnace set to 0
11/12/2010	1:30:55 AM	H2 valve closed
11/12/2010	1:30:55 AM	BCl3 valve closed
11/12/2010	1:30:55 AM	PH3 valve closed
11/12/2010	1:30:55 AM	SiCl4 pre valve closed
11/12/2010	1:30:55 AM	SiCl4 post valve closed
11/12/2010	1:30:55 AM	Bubbler valve closed
11/12/2010	1:30:55 AM	Helium valve opened
11/12/2010	1:30:55 AM	Main Vac valve opened
11/12/2010	1:30:55 AM	Bypass valve opened
11/12/2010	1:30:55 AM	Helium MFC set to  100.000000
11/12/2010	1:30:55 AM	H2 MFC set to  0.000000
11/12/2010	1:30:55 AM	BCl3 MFC set to  0.000000
11/12/2010	1:30:55 AM	PHl3 MFC set to  0.000000
11/12/2010	1:30:55 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:30:55 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:30:55 AM	Tube furnace set to 0
11/12/2010	1:31:04 AM	Run aborted at 1:31 AM
11/12/2010	1:31:04 AM	Helium valve closed
11/12/2010	1:31:04 AM	H2 valve closed
11/12/2010	1:31:04 AM	BCl3 valve closed
11/12/2010	1:31:04 AM	PH3 valve closed
11/12/2010	1:31:04 AM	SiCl4 pre valve closed
11/12/2010	1:31:04 AM	SiCl4 post valve closed
11/12/2010	1:31:04 AM	Bypass valve closed
11/12/2010	1:31:04 AM	Main Vac valve closed
11/12/2010	1:31:04 AM	Bubbler valve closed
11/12/2010	1:31:04 AM	Helium MFC set to  0.000000
11/12/2010	1:31:04 AM	H2 MFC set to  0.000000
11/12/2010	1:31:04 AM	BCl3 MFC set to  0.000000
11/12/2010	1:31:04 AM	PHl3 MFC set to  0.000000
11/12/2010	1:31:04 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:31:04 AM	Tube furnace set to 0
11/12/2010	1:31:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	1:31:07 AM	Bypass valve opened
11/12/2010	1:31:07 AM	Main Vac valve opened
11/12/2010	1:32:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	1:32:11 AM	Recipe started at 1:32 AM
11/12/2010	1:32:11 AM	Helium valve closed
11/12/2010	1:32:11 AM	H2 valve closed
11/12/2010	1:32:11 AM	BCl3 valve closed
11/12/2010	1:32:11 AM	PH3 valve closed
11/12/2010	1:32:11 AM	SiCl4 pre valve closed
11/12/2010	1:32:11 AM	SiCl4 post valve closed
11/12/2010	1:32:11 AM	Main Vac valve closed
11/12/2010	1:32:11 AM	Bubbler valve closed
11/12/2010	1:32:11 AM	Bypass valve opened
11/12/2010	1:32:11 AM	Helium MFC set to  0.000000
11/12/2010	1:32:11 AM	H2 MFC set to  0.000000
11/12/2010	1:32:11 AM	BCl3 MFC set to  0.000000
11/12/2010	1:32:11 AM	PHl3 MFC set to  0.000000
11/12/2010	1:32:11 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:32:11 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:32:12 AM	Tube furnace set to 0
11/12/2010	1:32:12 AM	Helium valve closed
11/12/2010	1:32:12 AM	H2 valve closed
11/12/2010	1:32:12 AM	BCl3 valve closed
11/12/2010	1:32:12 AM	PH3 valve closed
11/12/2010	1:32:12 AM	SiCl4 pre valve closed
11/12/2010	1:32:12 AM	SiCl4 post valve closed
11/12/2010	1:32:12 AM	Bubbler valve closed
11/12/2010	1:32:12 AM	Main Vac valve opened
11/12/2010	1:32:12 AM	Bypass valve opened
11/12/2010	1:32:12 AM	Helium MFC set to  0.000000
11/12/2010	1:32:12 AM	H2 MFC set to  0.000000
11/12/2010	1:32:12 AM	BCl3 MFC set to  0.000000
11/12/2010	1:32:12 AM	PHl3 MFC set to  0.000000
11/12/2010	1:32:12 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:32:12 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:32:12 AM	Tube furnace set to 0
11/12/2010	1:33:12 AM	H2 valve closed
11/12/2010	1:33:12 AM	BCl3 valve closed
11/12/2010	1:33:12 AM	PH3 valve closed
11/12/2010	1:33:12 AM	SiCl4 pre valve closed
11/12/2010	1:33:12 AM	SiCl4 post valve closed
11/12/2010	1:33:12 AM	Bubbler valve closed
11/12/2010	1:33:12 AM	Helium valve opened
11/12/2010	1:33:12 AM	Main Vac valve opened
11/12/2010	1:33:12 AM	Bypass valve opened
11/12/2010	1:33:12 AM	Helium MFC set to  100.000000
11/12/2010	1:33:12 AM	H2 MFC set to  0.000000
11/12/2010	1:33:12 AM	BCl3 MFC set to  0.000000
11/12/2010	1:33:12 AM	PHl3 MFC set to  0.000000
11/12/2010	1:33:12 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:33:12 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:33:12 AM	Tube furnace set to 0
11/12/2010	1:34:12 AM	Helium valve closed
11/12/2010	1:34:12 AM	H2 valve closed
11/12/2010	1:34:12 AM	BCl3 valve closed
11/12/2010	1:34:12 AM	PH3 valve closed
11/12/2010	1:34:12 AM	SiCl4 pre valve closed
11/12/2010	1:34:12 AM	SiCl4 post valve closed
11/12/2010	1:34:12 AM	Bubbler valve closed
11/12/2010	1:34:12 AM	Main Vac valve opened
11/12/2010	1:34:12 AM	Bypass valve opened
11/12/2010	1:34:12 AM	Helium MFC set to  0.000000
11/12/2010	1:34:12 AM	H2 MFC set to  0.000000
11/12/2010	1:34:12 AM	BCl3 MFC set to  0.000000
11/12/2010	1:34:12 AM	PHl3 MFC set to  0.000000
11/12/2010	1:34:12 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:34:12 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:34:12 AM	Tube furnace set to 0
11/12/2010	1:35:12 AM	H2 valve closed
11/12/2010	1:35:12 AM	BCl3 valve closed
11/12/2010	1:35:12 AM	PH3 valve closed
11/12/2010	1:35:12 AM	SiCl4 pre valve closed
11/12/2010	1:35:12 AM	SiCl4 post valve closed
11/12/2010	1:35:12 AM	Bubbler valve closed
11/12/2010	1:35:12 AM	Helium valve opened
11/12/2010	1:35:12 AM	Main Vac valve opened
11/12/2010	1:35:12 AM	Bypass valve opened
11/12/2010	1:35:12 AM	Helium MFC set to  100.000000
11/12/2010	1:35:12 AM	H2 MFC set to  0.000000
11/12/2010	1:35:12 AM	BCl3 MFC set to  0.000000
11/12/2010	1:35:12 AM	PHl3 MFC set to  0.000000
11/12/2010	1:35:12 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:35:12 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:35:13 AM	Tube furnace set to 0
11/12/2010	1:36:03 AM	Run aborted at 1:36 AM
11/12/2010	1:36:03 AM	Helium valve closed
11/12/2010	1:36:03 AM	H2 valve closed
11/12/2010	1:36:03 AM	BCl3 valve closed
11/12/2010	1:36:03 AM	PH3 valve closed
11/12/2010	1:36:03 AM	SiCl4 pre valve closed
11/12/2010	1:36:03 AM	SiCl4 post valve closed
11/12/2010	1:36:03 AM	Bypass valve closed
11/12/2010	1:36:03 AM	Main Vac valve closed
11/12/2010	1:36:03 AM	Bubbler valve closed
11/12/2010	1:36:03 AM	Helium MFC set to  0.000000
11/12/2010	1:36:03 AM	H2 MFC set to  0.000000
11/12/2010	1:36:03 AM	BCl3 MFC set to  0.000000
11/12/2010	1:36:03 AM	PHl3 MFC set to  0.000000
11/12/2010	1:36:03 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:36:03 AM	Tube furnace set to 0
11/12/2010	1:36:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	1:36:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	1:36:20 AM	Recipe started at 1:36 AM
11/12/2010	1:36:20 AM	Helium valve closed
11/12/2010	1:36:20 AM	H2 valve closed
11/12/2010	1:36:20 AM	BCl3 valve closed
11/12/2010	1:36:20 AM	PH3 valve closed
11/12/2010	1:36:20 AM	SiCl4 pre valve closed
11/12/2010	1:36:20 AM	SiCl4 post valve closed
11/12/2010	1:36:20 AM	Main Vac valve closed
11/12/2010	1:36:20 AM	Bubbler valve closed
11/12/2010	1:36:20 AM	Bypass valve opened
11/12/2010	1:36:20 AM	Helium MFC set to  0.000000
11/12/2010	1:36:20 AM	H2 MFC set to  0.000000
11/12/2010	1:36:20 AM	BCl3 MFC set to  0.000000
11/12/2010	1:36:20 AM	PHl3 MFC set to  0.000000
11/12/2010	1:36:20 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:36:20 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:36:20 AM	Tube furnace set to 0
11/12/2010	1:36:20 AM	Helium valve closed
11/12/2010	1:36:20 AM	H2 valve closed
11/12/2010	1:36:20 AM	BCl3 valve closed
11/12/2010	1:36:20 AM	PH3 valve closed
11/12/2010	1:36:20 AM	SiCl4 pre valve closed
11/12/2010	1:36:20 AM	SiCl4 post valve closed
11/12/2010	1:36:20 AM	Bubbler valve closed
11/12/2010	1:36:20 AM	Main Vac valve opened
11/12/2010	1:36:20 AM	Bypass valve opened
11/12/2010	1:36:20 AM	Helium MFC set to  0.000000
11/12/2010	1:36:20 AM	H2 MFC set to  0.000000
11/12/2010	1:36:20 AM	BCl3 MFC set to  0.000000
11/12/2010	1:36:20 AM	PHl3 MFC set to  0.000000
11/12/2010	1:36:20 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:36:20 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:36:20 AM	Tube furnace set to 0
11/12/2010	1:37:20 AM	H2 valve closed
11/12/2010	1:37:20 AM	BCl3 valve closed
11/12/2010	1:37:20 AM	PH3 valve closed
11/12/2010	1:37:20 AM	SiCl4 pre valve closed
11/12/2010	1:37:20 AM	SiCl4 post valve closed
11/12/2010	1:37:20 AM	Bubbler valve closed
11/12/2010	1:37:20 AM	Helium valve opened
11/12/2010	1:37:20 AM	Main Vac valve opened
11/12/2010	1:37:20 AM	Bypass valve opened
11/12/2010	1:37:20 AM	Helium MFC set to  100.000000
11/12/2010	1:37:20 AM	H2 MFC set to  0.000000
11/12/2010	1:37:20 AM	BCl3 MFC set to  0.000000
11/12/2010	1:37:20 AM	PHl3 MFC set to  0.000000
11/12/2010	1:37:20 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:37:20 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:37:20 AM	Tube furnace set to 0
11/12/2010	1:38:20 AM	Helium valve closed
11/12/2010	1:38:20 AM	H2 valve closed
11/12/2010	1:38:20 AM	BCl3 valve closed
11/12/2010	1:38:20 AM	PH3 valve closed
11/12/2010	1:38:20 AM	SiCl4 pre valve closed
11/12/2010	1:38:20 AM	SiCl4 post valve closed
11/12/2010	1:38:20 AM	Bubbler valve closed
11/12/2010	1:38:20 AM	Main Vac valve opened
11/12/2010	1:38:20 AM	Bypass valve opened
11/12/2010	1:38:20 AM	Helium MFC set to  0.000000
11/12/2010	1:38:20 AM	H2 MFC set to  0.000000
11/12/2010	1:38:20 AM	BCl3 MFC set to  0.000000
11/12/2010	1:38:20 AM	PHl3 MFC set to  0.000000
11/12/2010	1:38:20 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:38:20 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:38:21 AM	Tube furnace set to 0
11/12/2010	1:39:21 AM	H2 valve closed
11/12/2010	1:39:21 AM	BCl3 valve closed
11/12/2010	1:39:21 AM	PH3 valve closed
11/12/2010	1:39:21 AM	SiCl4 pre valve closed
11/12/2010	1:39:21 AM	SiCl4 post valve closed
11/12/2010	1:39:21 AM	Bubbler valve closed
11/12/2010	1:39:21 AM	Helium valve opened
11/12/2010	1:39:21 AM	Main Vac valve opened
11/12/2010	1:39:21 AM	Bypass valve opened
11/12/2010	1:39:21 AM	Helium MFC set to  100.000000
11/12/2010	1:39:21 AM	H2 MFC set to  0.000000
11/12/2010	1:39:21 AM	BCl3 MFC set to  0.000000
11/12/2010	1:39:21 AM	PHl3 MFC set to  0.000000
11/12/2010	1:39:21 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:39:21 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:39:21 AM	Tube furnace set to 0
11/12/2010	1:40:21 AM	Helium valve closed
11/12/2010	1:40:21 AM	H2 valve closed
11/12/2010	1:40:21 AM	BCl3 valve closed
11/12/2010	1:40:21 AM	PH3 valve closed
11/12/2010	1:40:21 AM	SiCl4 pre valve closed
11/12/2010	1:40:21 AM	SiCl4 post valve closed
11/12/2010	1:40:21 AM	Bubbler valve closed
11/12/2010	1:40:21 AM	Main Vac valve opened
11/12/2010	1:40:21 AM	Bypass valve opened
11/12/2010	1:40:21 AM	Helium MFC set to  0.000000
11/12/2010	1:40:21 AM	H2 MFC set to  0.000000
11/12/2010	1:40:21 AM	BCl3 MFC set to  0.000000
11/12/2010	1:40:21 AM	PHl3 MFC set to  0.000000
11/12/2010	1:40:21 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:40:21 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:40:21 AM	Tube furnace set to 0
11/12/2010	1:41:21 AM	H2 valve closed
11/12/2010	1:41:21 AM	BCl3 valve closed
11/12/2010	1:41:21 AM	PH3 valve closed
11/12/2010	1:41:21 AM	SiCl4 pre valve closed
11/12/2010	1:41:21 AM	SiCl4 post valve closed
11/12/2010	1:41:21 AM	Bubbler valve closed
11/12/2010	1:41:21 AM	Helium valve opened
11/12/2010	1:41:21 AM	Main Vac valve opened
11/12/2010	1:41:21 AM	Bypass valve opened
11/12/2010	1:41:21 AM	Helium MFC set to  100.000000
11/12/2010	1:41:21 AM	H2 MFC set to  0.000000
11/12/2010	1:41:21 AM	BCl3 MFC set to  0.000000
11/12/2010	1:41:21 AM	PHl3 MFC set to  0.000000
11/12/2010	1:41:21 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:41:21 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:41:21 AM	Tube furnace set to 0
11/12/2010	1:42:21 AM	Helium valve closed
11/12/2010	1:42:21 AM	H2 valve closed
11/12/2010	1:42:21 AM	BCl3 valve closed
11/12/2010	1:42:21 AM	PH3 valve closed
11/12/2010	1:42:21 AM	SiCl4 pre valve closed
11/12/2010	1:42:21 AM	SiCl4 post valve closed
11/12/2010	1:42:21 AM	Bubbler valve closed
11/12/2010	1:42:21 AM	Main Vac valve opened
11/12/2010	1:42:21 AM	Bypass valve opened
11/12/2010	1:42:21 AM	Helium MFC set to  0.000000
11/12/2010	1:42:21 AM	H2 MFC set to  0.000000
11/12/2010	1:42:21 AM	BCl3 MFC set to  0.000000
11/12/2010	1:42:21 AM	PHl3 MFC set to  0.000000
11/12/2010	1:42:21 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:42:21 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:42:21 AM	Tube furnace set to 0
11/12/2010	1:43:21 AM	H2 valve closed
11/12/2010	1:43:21 AM	BCl3 valve closed
11/12/2010	1:43:21 AM	PH3 valve closed
11/12/2010	1:43:21 AM	SiCl4 pre valve closed
11/12/2010	1:43:21 AM	SiCl4 post valve closed
11/12/2010	1:43:21 AM	Bubbler valve closed
11/12/2010	1:43:21 AM	Helium valve opened
11/12/2010	1:43:21 AM	Main Vac valve opened
11/12/2010	1:43:21 AM	Bypass valve opened
11/12/2010	1:43:21 AM	Helium MFC set to  100.000000
11/12/2010	1:43:21 AM	H2 MFC set to  0.000000
11/12/2010	1:43:21 AM	BCl3 MFC set to  0.000000
11/12/2010	1:43:21 AM	PHl3 MFC set to  0.000000
11/12/2010	1:43:21 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:43:21 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:43:22 AM	Tube furnace set to 0
11/12/2010	1:44:22 AM	Helium valve closed
11/12/2010	1:44:22 AM	H2 valve closed
11/12/2010	1:44:22 AM	BCl3 valve closed
11/12/2010	1:44:22 AM	PH3 valve closed
11/12/2010	1:44:22 AM	SiCl4 pre valve closed
11/12/2010	1:44:22 AM	SiCl4 post valve closed
11/12/2010	1:44:22 AM	Bubbler valve closed
11/12/2010	1:44:22 AM	Main Vac valve opened
11/12/2010	1:44:22 AM	Bypass valve opened
11/12/2010	1:44:22 AM	Helium MFC set to  0.000000
11/12/2010	1:44:22 AM	H2 MFC set to  0.000000
11/12/2010	1:44:22 AM	BCl3 MFC set to  0.000000
11/12/2010	1:44:22 AM	PHl3 MFC set to  0.000000
11/12/2010	1:44:22 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:44:22 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:44:22 AM	Tube furnace set to 0
11/12/2010	1:45:22 AM	H2 valve closed
11/12/2010	1:45:22 AM	BCl3 valve closed
11/12/2010	1:45:22 AM	PH3 valve closed
11/12/2010	1:45:22 AM	SiCl4 pre valve closed
11/12/2010	1:45:22 AM	SiCl4 post valve closed
11/12/2010	1:45:22 AM	Bubbler valve closed
11/12/2010	1:45:22 AM	Helium valve opened
11/12/2010	1:45:22 AM	Main Vac valve opened
11/12/2010	1:45:22 AM	Bypass valve opened
11/12/2010	1:45:22 AM	Helium MFC set to  100.000000
11/12/2010	1:45:22 AM	H2 MFC set to  0.000000
11/12/2010	1:45:22 AM	BCl3 MFC set to  0.000000
11/12/2010	1:45:22 AM	PHl3 MFC set to  0.000000
11/12/2010	1:45:22 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:45:22 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:45:22 AM	Tube furnace set to 0
11/12/2010	1:46:22 AM	Helium valve closed
11/12/2010	1:46:22 AM	H2 valve closed
11/12/2010	1:46:22 AM	BCl3 valve closed
11/12/2010	1:46:22 AM	PH3 valve closed
11/12/2010	1:46:22 AM	SiCl4 pre valve closed
11/12/2010	1:46:22 AM	SiCl4 post valve closed
11/12/2010	1:46:22 AM	Bubbler valve closed
11/12/2010	1:46:22 AM	Main Vac valve opened
11/12/2010	1:46:22 AM	Bypass valve opened
11/12/2010	1:46:22 AM	Helium MFC set to  0.000000
11/12/2010	1:46:22 AM	H2 MFC set to  0.000000
11/12/2010	1:46:22 AM	BCl3 MFC set to  0.000000
11/12/2010	1:46:22 AM	PHl3 MFC set to  0.000000
11/12/2010	1:46:22 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:46:22 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:46:22 AM	Tube furnace set to 0
11/12/2010	1:47:22 AM	H2 valve closed
11/12/2010	1:47:22 AM	BCl3 valve closed
11/12/2010	1:47:22 AM	PH3 valve closed
11/12/2010	1:47:22 AM	SiCl4 pre valve closed
11/12/2010	1:47:22 AM	SiCl4 post valve closed
11/12/2010	1:47:22 AM	Bubbler valve closed
11/12/2010	1:47:22 AM	Helium valve opened
11/12/2010	1:47:22 AM	Main Vac valve opened
11/12/2010	1:47:22 AM	Bypass valve opened
11/12/2010	1:47:22 AM	Helium MFC set to  100.000000
11/12/2010	1:47:22 AM	H2 MFC set to  0.000000
11/12/2010	1:47:22 AM	BCl3 MFC set to  0.000000
11/12/2010	1:47:22 AM	PHl3 MFC set to  0.000000
11/12/2010	1:47:22 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:47:22 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:47:22 AM	Tube furnace set to 0
11/12/2010	1:48:22 AM	Helium valve closed
11/12/2010	1:48:22 AM	H2 valve closed
11/12/2010	1:48:22 AM	BCl3 valve closed
11/12/2010	1:48:22 AM	PH3 valve closed
11/12/2010	1:48:22 AM	SiCl4 pre valve closed
11/12/2010	1:48:22 AM	SiCl4 post valve closed
11/12/2010	1:48:22 AM	Bubbler valve closed
11/12/2010	1:48:22 AM	Main Vac valve opened
11/12/2010	1:48:22 AM	Bypass valve opened
11/12/2010	1:48:22 AM	Helium MFC set to  0.000000
11/12/2010	1:48:22 AM	H2 MFC set to  0.000000
11/12/2010	1:48:22 AM	BCl3 MFC set to  0.000000
11/12/2010	1:48:22 AM	PHl3 MFC set to  0.000000
11/12/2010	1:48:22 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:48:22 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:48:23 AM	Tube furnace set to 0
11/12/2010	1:49:23 AM	H2 valve closed
11/12/2010	1:49:23 AM	BCl3 valve closed
11/12/2010	1:49:23 AM	PH3 valve closed
11/12/2010	1:49:23 AM	SiCl4 pre valve closed
11/12/2010	1:49:23 AM	SiCl4 post valve closed
11/12/2010	1:49:23 AM	Bubbler valve closed
11/12/2010	1:49:23 AM	Helium valve opened
11/12/2010	1:49:23 AM	Main Vac valve opened
11/12/2010	1:49:23 AM	Bypass valve opened
11/12/2010	1:49:23 AM	Helium MFC set to  100.000000
11/12/2010	1:49:23 AM	H2 MFC set to  0.000000
11/12/2010	1:49:23 AM	BCl3 MFC set to  0.000000
11/12/2010	1:49:23 AM	PHl3 MFC set to  0.000000
11/12/2010	1:49:23 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:49:23 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:49:23 AM	Tube furnace set to 0
11/12/2010	1:50:23 AM	Helium valve closed
11/12/2010	1:50:23 AM	H2 valve closed
11/12/2010	1:50:23 AM	BCl3 valve closed
11/12/2010	1:50:23 AM	PH3 valve closed
11/12/2010	1:50:23 AM	SiCl4 pre valve closed
11/12/2010	1:50:23 AM	SiCl4 post valve closed
11/12/2010	1:50:23 AM	Bubbler valve closed
11/12/2010	1:50:23 AM	Main Vac valve opened
11/12/2010	1:50:23 AM	Bypass valve opened
11/12/2010	1:50:23 AM	Helium MFC set to  0.000000
11/12/2010	1:50:23 AM	H2 MFC set to  0.000000
11/12/2010	1:50:23 AM	BCl3 MFC set to  0.000000
11/12/2010	1:50:23 AM	PHl3 MFC set to  0.000000
11/12/2010	1:50:23 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:50:23 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:50:23 AM	Tube furnace set to 0
11/12/2010	1:51:23 AM	H2 valve closed
11/12/2010	1:51:23 AM	BCl3 valve closed
11/12/2010	1:51:23 AM	PH3 valve closed
11/12/2010	1:51:23 AM	SiCl4 pre valve closed
11/12/2010	1:51:23 AM	SiCl4 post valve closed
11/12/2010	1:51:23 AM	Bubbler valve closed
11/12/2010	1:51:23 AM	Helium valve opened
11/12/2010	1:51:23 AM	Main Vac valve opened
11/12/2010	1:51:23 AM	Bypass valve opened
11/12/2010	1:51:23 AM	Helium MFC set to  100.000000
11/12/2010	1:51:23 AM	H2 MFC set to  0.000000
11/12/2010	1:51:23 AM	BCl3 MFC set to  0.000000
11/12/2010	1:51:23 AM	PHl3 MFC set to  0.000000
11/12/2010	1:51:23 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:51:23 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:51:23 AM	Tube furnace set to 0
11/12/2010	1:52:23 AM	Helium valve closed
11/12/2010	1:52:23 AM	H2 valve closed
11/12/2010	1:52:23 AM	BCl3 valve closed
11/12/2010	1:52:23 AM	PH3 valve closed
11/12/2010	1:52:23 AM	SiCl4 pre valve closed
11/12/2010	1:52:23 AM	SiCl4 post valve closed
11/12/2010	1:52:23 AM	Bubbler valve closed
11/12/2010	1:52:23 AM	Main Vac valve opened
11/12/2010	1:52:23 AM	Bypass valve opened
11/12/2010	1:52:23 AM	Helium MFC set to  0.000000
11/12/2010	1:52:23 AM	H2 MFC set to  0.000000
11/12/2010	1:52:23 AM	BCl3 MFC set to  0.000000
11/12/2010	1:52:23 AM	PHl3 MFC set to  0.000000
11/12/2010	1:52:23 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:52:23 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:52:23 AM	Tube furnace set to 0
11/12/2010	1:53:23 AM	H2 valve closed
11/12/2010	1:53:23 AM	BCl3 valve closed
11/12/2010	1:53:23 AM	PH3 valve closed
11/12/2010	1:53:23 AM	SiCl4 pre valve closed
11/12/2010	1:53:23 AM	SiCl4 post valve closed
11/12/2010	1:53:23 AM	Bubbler valve closed
11/12/2010	1:53:23 AM	Helium valve opened
11/12/2010	1:53:23 AM	Main Vac valve opened
11/12/2010	1:53:23 AM	Bypass valve opened
11/12/2010	1:53:23 AM	Helium MFC set to  100.000000
11/12/2010	1:53:23 AM	H2 MFC set to  0.000000
11/12/2010	1:53:23 AM	BCl3 MFC set to  0.000000
11/12/2010	1:53:23 AM	PHl3 MFC set to  0.000000
11/12/2010	1:53:23 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:53:23 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:53:24 AM	Tube furnace set to 0
11/12/2010	1:54:24 AM	Helium valve closed
11/12/2010	1:54:24 AM	H2 valve closed
11/12/2010	1:54:24 AM	BCl3 valve closed
11/12/2010	1:54:24 AM	PH3 valve closed
11/12/2010	1:54:24 AM	SiCl4 pre valve closed
11/12/2010	1:54:24 AM	SiCl4 post valve closed
11/12/2010	1:54:24 AM	Bubbler valve closed
11/12/2010	1:54:24 AM	Main Vac valve opened
11/12/2010	1:54:24 AM	Bypass valve opened
11/12/2010	1:54:24 AM	Helium MFC set to  0.000000
11/12/2010	1:54:24 AM	H2 MFC set to  0.000000
11/12/2010	1:54:24 AM	BCl3 MFC set to  0.000000
11/12/2010	1:54:24 AM	PHl3 MFC set to  0.000000
11/12/2010	1:54:24 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:54:24 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:54:24 AM	Tube furnace set to 0
11/12/2010	1:55:24 AM	H2 valve closed
11/12/2010	1:55:24 AM	BCl3 valve closed
11/12/2010	1:55:24 AM	PH3 valve closed
11/12/2010	1:55:24 AM	SiCl4 pre valve closed
11/12/2010	1:55:24 AM	SiCl4 post valve closed
11/12/2010	1:55:24 AM	Bubbler valve closed
11/12/2010	1:55:24 AM	Helium valve opened
11/12/2010	1:55:24 AM	Main Vac valve opened
11/12/2010	1:55:24 AM	Bypass valve opened
11/12/2010	1:55:24 AM	Helium MFC set to  100.000000
11/12/2010	1:55:24 AM	H2 MFC set to  0.000000
11/12/2010	1:55:24 AM	BCl3 MFC set to  0.000000
11/12/2010	1:55:24 AM	PHl3 MFC set to  0.000000
11/12/2010	1:55:24 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:55:24 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:55:24 AM	Tube furnace set to 0
11/12/2010	1:56:24 AM	Helium valve closed
11/12/2010	1:56:24 AM	H2 valve closed
11/12/2010	1:56:24 AM	BCl3 valve closed
11/12/2010	1:56:24 AM	PH3 valve closed
11/12/2010	1:56:24 AM	SiCl4 pre valve closed
11/12/2010	1:56:24 AM	SiCl4 post valve closed
11/12/2010	1:56:24 AM	Bubbler valve closed
11/12/2010	1:56:24 AM	Main Vac valve opened
11/12/2010	1:56:24 AM	Bypass valve opened
11/12/2010	1:56:24 AM	Helium MFC set to  0.000000
11/12/2010	1:56:24 AM	H2 MFC set to  0.000000
11/12/2010	1:56:24 AM	BCl3 MFC set to  0.000000
11/12/2010	1:56:24 AM	PHl3 MFC set to  0.000000
11/12/2010	1:56:24 AM	SiCl4 MFC set to  0.000000
11/12/2010	1:56:24 AM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:56:24 AM	Tube furnace set to 0
11/12/2010	1:56:25 AM	Run finished at 1:56 AM
11/12/2010	1:56:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	1:04:26 PM	Bypass valve closed
11/12/2010	1:04:27 PM	Main Vac valve closed
11/12/2010	1:05:57 PM	Bypass valve opened
11/12/2010	1:05:59 PM	Main Vac valve opened
11/12/2010	1:06:51 PM	Recipe started at 1:06 PM
11/12/2010	1:06:51 PM	Helium valve closed
11/12/2010	1:06:51 PM	BCl3 valve closed
11/12/2010	1:06:51 PM	PH3 valve closed
11/12/2010	1:06:51 PM	SiCl4 pre valve closed
11/12/2010	1:06:51 PM	SiCl4 post valve closed
11/12/2010	1:06:51 PM	Main Vac valve closed
11/12/2010	1:06:51 PM	Bypass valve closed
11/12/2010	1:06:51 PM	Bubbler valve closed
11/12/2010	1:06:51 PM	H2 valve opened
11/12/2010	1:06:51 PM	Helium MFC set to  0.000000
11/12/2010	1:06:51 PM	H2 MFC set to  500.000000
11/12/2010	1:06:51 PM	BCl3 MFC set to  0.000000
11/12/2010	1:06:51 PM	PHl3 MFC set to  0.000000
11/12/2010	1:06:51 PM	SiCl4 MFC set to  0.000000
11/12/2010	1:06:51 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:06:52 PM	Tube furnace set to 0
11/12/2010	1:08:16 PM	Helium valve closed
11/12/2010	1:08:16 PM	BCl3 valve closed
11/12/2010	1:08:16 PM	PH3 valve closed
11/12/2010	1:08:16 PM	SiCl4 pre valve closed
11/12/2010	1:08:16 PM	SiCl4 post valve closed
11/12/2010	1:08:16 PM	Main Vac valve closed
11/12/2010	1:08:16 PM	Bypass valve closed
11/12/2010	1:08:16 PM	H2 valve opened
11/12/2010	1:08:16 PM	Bubbler valve opened
11/12/2010	1:08:16 PM	Helium MFC set to  0.000000
11/12/2010	1:08:16 PM	H2 MFC set to  500.000000
11/12/2010	1:08:16 PM	BCl3 MFC set to  0.000000
11/12/2010	1:08:16 PM	PHl3 MFC set to  0.000000
11/12/2010	1:08:16 PM	SiCl4 MFC set to  0.000000
11/12/2010	1:08:16 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:08:17 PM	Tube furnace set to 1000
11/12/2010	1:28:16 PM	Helium valve closed
11/12/2010	1:28:16 PM	BCl3 valve closed
11/12/2010	1:28:16 PM	Main Vac valve closed
11/12/2010	1:28:17 PM	Bypass valve closed
11/12/2010	1:28:17 PM	H2 valve opened
11/12/2010	1:28:17 PM	PH3 valve opened
11/12/2010	1:28:17 PM	SiCl4 pre valve opened
11/12/2010	1:28:17 PM	SiCl4 post valve opened
11/12/2010	1:28:17 PM	Bubbler valve opened
11/12/2010	1:28:17 PM	Helium MFC set to  0.000000
11/12/2010	1:28:17 PM	H2 MFC set to  500.000000
11/12/2010	1:28:17 PM	BCl3 MFC set to  0.000000
11/12/2010	1:28:17 PM	PHl3 MFC set to  1.000000
11/12/2010	1:28:17 PM	SiCl4 MFC set to  50.000000
11/12/2010	1:28:17 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:28:17 PM	Tube furnace set to 1000
11/12/2010	1:58:17 PM	H2 valve closed
11/12/2010	1:58:17 PM	BCl3 valve closed
11/12/2010	1:58:17 PM	PH3 valve closed
11/12/2010	1:58:17 PM	SiCl4 pre valve closed
11/12/2010	1:58:17 PM	SiCl4 post valve closed
11/12/2010	1:58:17 PM	Main Vac valve closed
11/12/2010	1:58:17 PM	Bypass valve closed
11/12/2010	1:58:17 PM	Helium valve opened
11/12/2010	1:58:17 PM	Bubbler valve opened
11/12/2010	1:58:17 PM	Helium MFC set to  500.000000
11/12/2010	1:58:17 PM	H2 MFC set to  0.000000
11/12/2010	1:58:17 PM	BCl3 MFC set to  0.000000
11/12/2010	1:58:17 PM	PHl3 MFC set to  0.000000
11/12/2010	1:58:17 PM	SiCl4 MFC set to  0.000000
11/12/2010	1:58:17 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	1:58:17 PM	Tube furnace set to 0
11/12/2010	2:18:17 PM	Helium valve closed
11/12/2010	2:18:17 PM	H2 valve closed
11/12/2010	2:18:17 PM	BCl3 valve closed
11/12/2010	2:18:17 PM	PH3 valve closed
11/12/2010	2:18:17 PM	SiCl4 pre valve closed
11/12/2010	2:18:17 PM	SiCl4 post valve closed
11/12/2010	2:18:17 PM	Main Vac valve closed
11/12/2010	2:18:17 PM	Bypass valve closed
11/12/2010	2:18:17 PM	Bubbler valve closed
11/12/2010	2:18:17 PM	Helium MFC set to  0.000000
11/12/2010	2:18:17 PM	H2 MFC set to  0.000000
11/12/2010	2:18:17 PM	BCl3 MFC set to  0.000000
11/12/2010	2:18:17 PM	PHl3 MFC set to  0.000000
11/12/2010	2:18:17 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:18:17 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:18:17 PM	Tube furnace set to 0
11/12/2010	2:18:17 PM	Run finished at 2:18 PM
11/12/2010	2:24:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2010	2:24:07 PM	Recipe started at 2:24 PM
11/12/2010	2:24:07 PM	Helium valve closed
11/12/2010	2:24:07 PM	H2 valve closed
11/12/2010	2:24:07 PM	BCl3 valve closed
11/12/2010	2:24:07 PM	PH3 valve closed
11/12/2010	2:24:07 PM	SiCl4 pre valve closed
11/12/2010	2:24:07 PM	SiCl4 post valve closed
11/12/2010	2:24:07 PM	Main Vac valve closed
11/12/2010	2:24:07 PM	Bubbler valve closed
11/12/2010	2:24:07 PM	Bypass valve opened
11/12/2010	2:24:07 PM	Helium MFC set to  0.000000
11/12/2010	2:24:07 PM	H2 MFC set to  0.000000
11/12/2010	2:24:07 PM	BCl3 MFC set to  0.000000
11/12/2010	2:24:07 PM	PHl3 MFC set to  0.000000
11/12/2010	2:24:07 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:24:07 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:24:07 PM	Tube furnace set to 0
11/12/2010	2:25:00 PM	Helium valve closed
11/12/2010	2:25:00 PM	H2 valve closed
11/12/2010	2:25:00 PM	BCl3 valve closed
11/12/2010	2:25:00 PM	PH3 valve closed
11/12/2010	2:25:00 PM	SiCl4 pre valve closed
11/12/2010	2:25:00 PM	SiCl4 post valve closed
11/12/2010	2:25:00 PM	Bubbler valve closed
11/12/2010	2:25:00 PM	Main Vac valve opened
11/12/2010	2:25:00 PM	Bypass valve opened
11/12/2010	2:25:00 PM	Helium MFC set to  0.000000
11/12/2010	2:25:00 PM	H2 MFC set to  0.000000
11/12/2010	2:25:00 PM	BCl3 MFC set to  0.000000
11/12/2010	2:25:00 PM	PHl3 MFC set to  0.000000
11/12/2010	2:25:00 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:25:00 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:25:00 PM	Tube furnace set to 0
11/12/2010	2:25:00 PM	Run finished at 2:25 PM
11/12/2010	2:25:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2010	2:25:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	2:25:27 PM	Recipe started at 2:25 PM
11/12/2010	2:25:27 PM	Helium valve closed
11/12/2010	2:25:27 PM	H2 valve closed
11/12/2010	2:25:27 PM	BCl3 valve closed
11/12/2010	2:25:27 PM	PH3 valve closed
11/12/2010	2:25:27 PM	SiCl4 pre valve closed
11/12/2010	2:25:27 PM	SiCl4 post valve closed
11/12/2010	2:25:27 PM	Main Vac valve closed
11/12/2010	2:25:27 PM	Bubbler valve closed
11/12/2010	2:25:27 PM	Bypass valve opened
11/12/2010	2:25:27 PM	Helium MFC set to  0.000000
11/12/2010	2:25:27 PM	H2 MFC set to  0.000000
11/12/2010	2:25:27 PM	BCl3 MFC set to  0.000000
11/12/2010	2:25:27 PM	PHl3 MFC set to  0.000000
11/12/2010	2:25:27 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:25:27 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:25:27 PM	Tube furnace set to 0
11/12/2010	2:25:27 PM	Helium valve closed
11/12/2010	2:25:27 PM	H2 valve closed
11/12/2010	2:25:27 PM	BCl3 valve closed
11/12/2010	2:25:27 PM	PH3 valve closed
11/12/2010	2:25:27 PM	SiCl4 pre valve closed
11/12/2010	2:25:27 PM	SiCl4 post valve closed
11/12/2010	2:25:27 PM	Bubbler valve closed
11/12/2010	2:25:27 PM	Main Vac valve opened
11/12/2010	2:25:27 PM	Bypass valve opened
11/12/2010	2:25:27 PM	Helium MFC set to  0.000000
11/12/2010	2:25:27 PM	H2 MFC set to  0.000000
11/12/2010	2:25:27 PM	BCl3 MFC set to  0.000000
11/12/2010	2:25:27 PM	PHl3 MFC set to  0.000000
11/12/2010	2:25:27 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:25:27 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:25:28 PM	Tube furnace set to 0
11/12/2010	2:26:28 PM	H2 valve closed
11/12/2010	2:26:28 PM	BCl3 valve closed
11/12/2010	2:26:28 PM	PH3 valve closed
11/12/2010	2:26:28 PM	SiCl4 pre valve closed
11/12/2010	2:26:28 PM	SiCl4 post valve closed
11/12/2010	2:26:28 PM	Bubbler valve closed
11/12/2010	2:26:28 PM	Helium valve opened
11/12/2010	2:26:28 PM	Main Vac valve opened
11/12/2010	2:26:28 PM	Bypass valve opened
11/12/2010	2:26:28 PM	Helium MFC set to  100.000000
11/12/2010	2:26:28 PM	H2 MFC set to  0.000000
11/12/2010	2:26:28 PM	BCl3 MFC set to  0.000000
11/12/2010	2:26:28 PM	PHl3 MFC set to  0.000000
11/12/2010	2:26:28 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:26:28 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:26:28 PM	Tube furnace set to 0
11/12/2010	2:27:28 PM	Helium valve closed
11/12/2010	2:27:28 PM	H2 valve closed
11/12/2010	2:27:28 PM	BCl3 valve closed
11/12/2010	2:27:28 PM	PH3 valve closed
11/12/2010	2:27:28 PM	SiCl4 pre valve closed
11/12/2010	2:27:28 PM	SiCl4 post valve closed
11/12/2010	2:27:28 PM	Bubbler valve closed
11/12/2010	2:27:28 PM	Main Vac valve opened
11/12/2010	2:27:28 PM	Bypass valve opened
11/12/2010	2:27:28 PM	Helium MFC set to  0.000000
11/12/2010	2:27:28 PM	H2 MFC set to  0.000000
11/12/2010	2:27:28 PM	BCl3 MFC set to  0.000000
11/12/2010	2:27:28 PM	PHl3 MFC set to  0.000000
11/12/2010	2:27:28 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:27:28 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:27:28 PM	Tube furnace set to 0
11/12/2010	2:28:28 PM	H2 valve closed
11/12/2010	2:28:28 PM	BCl3 valve closed
11/12/2010	2:28:28 PM	PH3 valve closed
11/12/2010	2:28:28 PM	SiCl4 pre valve closed
11/12/2010	2:28:28 PM	SiCl4 post valve closed
11/12/2010	2:28:28 PM	Bubbler valve closed
11/12/2010	2:28:28 PM	Helium valve opened
11/12/2010	2:28:28 PM	Main Vac valve opened
11/12/2010	2:28:28 PM	Bypass valve opened
11/12/2010	2:28:28 PM	Helium MFC set to  100.000000
11/12/2010	2:28:28 PM	H2 MFC set to  0.000000
11/12/2010	2:28:28 PM	BCl3 MFC set to  0.000000
11/12/2010	2:28:28 PM	PHl3 MFC set to  0.000000
11/12/2010	2:28:28 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:28:28 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:28:28 PM	Tube furnace set to 0
11/12/2010	2:29:28 PM	Helium valve closed
11/12/2010	2:29:28 PM	H2 valve closed
11/12/2010	2:29:28 PM	BCl3 valve closed
11/12/2010	2:29:28 PM	PH3 valve closed
11/12/2010	2:29:28 PM	SiCl4 pre valve closed
11/12/2010	2:29:28 PM	SiCl4 post valve closed
11/12/2010	2:29:28 PM	Bubbler valve closed
11/12/2010	2:29:28 PM	Main Vac valve opened
11/12/2010	2:29:28 PM	Bypass valve opened
11/12/2010	2:29:28 PM	Helium MFC set to  0.000000
11/12/2010	2:29:28 PM	H2 MFC set to  0.000000
11/12/2010	2:29:28 PM	BCl3 MFC set to  0.000000
11/12/2010	2:29:28 PM	PHl3 MFC set to  0.000000
11/12/2010	2:29:28 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:29:28 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:29:28 PM	Tube furnace set to 0
11/12/2010	2:30:28 PM	H2 valve closed
11/12/2010	2:30:28 PM	BCl3 valve closed
11/12/2010	2:30:28 PM	PH3 valve closed
11/12/2010	2:30:28 PM	SiCl4 pre valve closed
11/12/2010	2:30:28 PM	SiCl4 post valve closed
11/12/2010	2:30:28 PM	Bubbler valve closed
11/12/2010	2:30:28 PM	Helium valve opened
11/12/2010	2:30:28 PM	Main Vac valve opened
11/12/2010	2:30:28 PM	Bypass valve opened
11/12/2010	2:30:28 PM	Helium MFC set to  100.000000
11/12/2010	2:30:28 PM	H2 MFC set to  0.000000
11/12/2010	2:30:28 PM	BCl3 MFC set to  0.000000
11/12/2010	2:30:28 PM	PHl3 MFC set to  0.000000
11/12/2010	2:30:28 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:30:28 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:30:28 PM	Tube furnace set to 0
11/12/2010	2:31:28 PM	Helium valve closed
11/12/2010	2:31:29 PM	H2 valve closed
11/12/2010	2:31:29 PM	BCl3 valve closed
11/12/2010	2:31:29 PM	PH3 valve closed
11/12/2010	2:31:29 PM	SiCl4 pre valve closed
11/12/2010	2:31:29 PM	SiCl4 post valve closed
11/12/2010	2:31:29 PM	Bubbler valve closed
11/12/2010	2:31:29 PM	Main Vac valve opened
11/12/2010	2:31:29 PM	Bypass valve opened
11/12/2010	2:31:29 PM	Helium MFC set to  0.000000
11/12/2010	2:31:29 PM	H2 MFC set to  0.000000
11/12/2010	2:31:29 PM	BCl3 MFC set to  0.000000
11/12/2010	2:31:29 PM	PHl3 MFC set to  0.000000
11/12/2010	2:31:29 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:31:29 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:31:29 PM	Tube furnace set to 0
11/12/2010	2:32:29 PM	H2 valve closed
11/12/2010	2:32:29 PM	BCl3 valve closed
11/12/2010	2:32:29 PM	PH3 valve closed
11/12/2010	2:32:29 PM	SiCl4 pre valve closed
11/12/2010	2:32:29 PM	SiCl4 post valve closed
11/12/2010	2:32:29 PM	Bubbler valve closed
11/12/2010	2:32:29 PM	Helium valve opened
11/12/2010	2:32:29 PM	Main Vac valve opened
11/12/2010	2:32:29 PM	Bypass valve opened
11/12/2010	2:32:29 PM	Helium MFC set to  100.000000
11/12/2010	2:32:29 PM	H2 MFC set to  0.000000
11/12/2010	2:32:29 PM	BCl3 MFC set to  0.000000
11/12/2010	2:32:29 PM	PHl3 MFC set to  0.000000
11/12/2010	2:32:29 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:32:29 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:32:29 PM	Tube furnace set to 0
11/12/2010	2:33:29 PM	Helium valve closed
11/12/2010	2:33:29 PM	H2 valve closed
11/12/2010	2:33:29 PM	BCl3 valve closed
11/12/2010	2:33:29 PM	PH3 valve closed
11/12/2010	2:33:29 PM	SiCl4 pre valve closed
11/12/2010	2:33:29 PM	SiCl4 post valve closed
11/12/2010	2:33:29 PM	Bubbler valve closed
11/12/2010	2:33:29 PM	Main Vac valve opened
11/12/2010	2:33:29 PM	Bypass valve opened
11/12/2010	2:33:29 PM	Helium MFC set to  0.000000
11/12/2010	2:33:29 PM	H2 MFC set to  0.000000
11/12/2010	2:33:29 PM	BCl3 MFC set to  0.000000
11/12/2010	2:33:29 PM	PHl3 MFC set to  0.000000
11/12/2010	2:33:29 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:33:29 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:33:29 PM	Tube furnace set to 0
11/12/2010	2:34:29 PM	H2 valve closed
11/12/2010	2:34:29 PM	BCl3 valve closed
11/12/2010	2:34:29 PM	PH3 valve closed
11/12/2010	2:34:29 PM	SiCl4 pre valve closed
11/12/2010	2:34:29 PM	SiCl4 post valve closed
11/12/2010	2:34:29 PM	Bubbler valve closed
11/12/2010	2:34:29 PM	Helium valve opened
11/12/2010	2:34:29 PM	Main Vac valve opened
11/12/2010	2:34:29 PM	Bypass valve opened
11/12/2010	2:34:29 PM	Helium MFC set to  100.000000
11/12/2010	2:34:29 PM	H2 MFC set to  0.000000
11/12/2010	2:34:29 PM	BCl3 MFC set to  0.000000
11/12/2010	2:34:29 PM	PHl3 MFC set to  0.000000
11/12/2010	2:34:29 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:34:29 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:34:29 PM	Tube furnace set to 0
11/12/2010	2:35:29 PM	Helium valve closed
11/12/2010	2:35:29 PM	H2 valve closed
11/12/2010	2:35:29 PM	BCl3 valve closed
11/12/2010	2:35:29 PM	PH3 valve closed
11/12/2010	2:35:29 PM	SiCl4 pre valve closed
11/12/2010	2:35:29 PM	SiCl4 post valve closed
11/12/2010	2:35:29 PM	Bubbler valve closed
11/12/2010	2:35:29 PM	Main Vac valve opened
11/12/2010	2:35:29 PM	Bypass valve opened
11/12/2010	2:35:29 PM	Helium MFC set to  0.000000
11/12/2010	2:35:29 PM	H2 MFC set to  0.000000
11/12/2010	2:35:29 PM	BCl3 MFC set to  0.000000
11/12/2010	2:35:29 PM	PHl3 MFC set to  0.000000
11/12/2010	2:35:29 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:35:29 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:35:29 PM	Tube furnace set to 0
11/12/2010	2:36:29 PM	H2 valve closed
11/12/2010	2:36:29 PM	BCl3 valve closed
11/12/2010	2:36:29 PM	PH3 valve closed
11/12/2010	2:36:29 PM	SiCl4 pre valve closed
11/12/2010	2:36:29 PM	SiCl4 post valve closed
11/12/2010	2:36:29 PM	Bubbler valve closed
11/12/2010	2:36:30 PM	Helium valve opened
11/12/2010	2:36:30 PM	Main Vac valve opened
11/12/2010	2:36:30 PM	Bypass valve opened
11/12/2010	2:36:30 PM	Helium MFC set to  100.000000
11/12/2010	2:36:30 PM	H2 MFC set to  0.000000
11/12/2010	2:36:30 PM	BCl3 MFC set to  0.000000
11/12/2010	2:36:30 PM	PHl3 MFC set to  0.000000
11/12/2010	2:36:30 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:36:30 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:36:30 PM	Tube furnace set to 0
11/12/2010	2:37:30 PM	Helium valve closed
11/12/2010	2:37:30 PM	H2 valve closed
11/12/2010	2:37:30 PM	BCl3 valve closed
11/12/2010	2:37:30 PM	PH3 valve closed
11/12/2010	2:37:30 PM	SiCl4 pre valve closed
11/12/2010	2:37:30 PM	SiCl4 post valve closed
11/12/2010	2:37:30 PM	Bubbler valve closed
11/12/2010	2:37:30 PM	Main Vac valve opened
11/12/2010	2:37:30 PM	Bypass valve opened
11/12/2010	2:37:30 PM	Helium MFC set to  0.000000
11/12/2010	2:37:30 PM	H2 MFC set to  0.000000
11/12/2010	2:37:30 PM	BCl3 MFC set to  0.000000
11/12/2010	2:37:30 PM	PHl3 MFC set to  0.000000
11/12/2010	2:37:30 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:37:30 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:37:30 PM	Tube furnace set to 0
11/12/2010	2:38:30 PM	H2 valve closed
11/12/2010	2:38:30 PM	BCl3 valve closed
11/12/2010	2:38:30 PM	PH3 valve closed
11/12/2010	2:38:30 PM	SiCl4 pre valve closed
11/12/2010	2:38:30 PM	SiCl4 post valve closed
11/12/2010	2:38:30 PM	Bubbler valve closed
11/12/2010	2:38:30 PM	Helium valve opened
11/12/2010	2:38:30 PM	Main Vac valve opened
11/12/2010	2:38:30 PM	Bypass valve opened
11/12/2010	2:38:30 PM	Helium MFC set to  100.000000
11/12/2010	2:38:30 PM	H2 MFC set to  0.000000
11/12/2010	2:38:30 PM	BCl3 MFC set to  0.000000
11/12/2010	2:38:30 PM	PHl3 MFC set to  0.000000
11/12/2010	2:38:30 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:38:30 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:38:30 PM	Tube furnace set to 0
11/12/2010	2:39:30 PM	Helium valve closed
11/12/2010	2:39:30 PM	H2 valve closed
11/12/2010	2:39:30 PM	BCl3 valve closed
11/12/2010	2:39:30 PM	PH3 valve closed
11/12/2010	2:39:30 PM	SiCl4 pre valve closed
11/12/2010	2:39:30 PM	SiCl4 post valve closed
11/12/2010	2:39:30 PM	Bubbler valve closed
11/12/2010	2:39:30 PM	Main Vac valve opened
11/12/2010	2:39:30 PM	Bypass valve opened
11/12/2010	2:39:30 PM	Helium MFC set to  0.000000
11/12/2010	2:39:30 PM	H2 MFC set to  0.000000
11/12/2010	2:39:30 PM	BCl3 MFC set to  0.000000
11/12/2010	2:39:30 PM	PHl3 MFC set to  0.000000
11/12/2010	2:39:30 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:39:30 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:39:30 PM	Tube furnace set to 0
11/12/2010	2:40:30 PM	H2 valve closed
11/12/2010	2:40:30 PM	BCl3 valve closed
11/12/2010	2:40:30 PM	PH3 valve closed
11/12/2010	2:40:30 PM	SiCl4 pre valve closed
11/12/2010	2:40:30 PM	SiCl4 post valve closed
11/12/2010	2:40:30 PM	Bubbler valve closed
11/12/2010	2:40:30 PM	Helium valve opened
11/12/2010	2:40:30 PM	Main Vac valve opened
11/12/2010	2:40:30 PM	Bypass valve opened
11/12/2010	2:40:30 PM	Helium MFC set to  100.000000
11/12/2010	2:40:30 PM	H2 MFC set to  0.000000
11/12/2010	2:40:30 PM	BCl3 MFC set to  0.000000
11/12/2010	2:40:30 PM	PHl3 MFC set to  0.000000
11/12/2010	2:40:30 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:40:30 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:40:30 PM	Tube furnace set to 0
11/12/2010	2:41:30 PM	Helium valve closed
11/12/2010	2:41:30 PM	H2 valve closed
11/12/2010	2:41:30 PM	BCl3 valve closed
11/12/2010	2:41:30 PM	PH3 valve closed
11/12/2010	2:41:30 PM	SiCl4 pre valve closed
11/12/2010	2:41:30 PM	SiCl4 post valve closed
11/12/2010	2:41:30 PM	Bubbler valve closed
11/12/2010	2:41:30 PM	Main Vac valve opened
11/12/2010	2:41:30 PM	Bypass valve opened
11/12/2010	2:41:30 PM	Helium MFC set to  0.000000
11/12/2010	2:41:30 PM	H2 MFC set to  0.000000
11/12/2010	2:41:30 PM	BCl3 MFC set to  0.000000
11/12/2010	2:41:30 PM	PHl3 MFC set to  0.000000
11/12/2010	2:41:30 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:41:30 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:41:31 PM	Tube furnace set to 0
11/12/2010	2:42:31 PM	H2 valve closed
11/12/2010	2:42:31 PM	BCl3 valve closed
11/12/2010	2:42:31 PM	PH3 valve closed
11/12/2010	2:42:31 PM	SiCl4 pre valve closed
11/12/2010	2:42:31 PM	SiCl4 post valve closed
11/12/2010	2:42:31 PM	Bubbler valve closed
11/12/2010	2:42:31 PM	Helium valve opened
11/12/2010	2:42:31 PM	Main Vac valve opened
11/12/2010	2:42:31 PM	Bypass valve opened
11/12/2010	2:42:31 PM	Helium MFC set to  100.000000
11/12/2010	2:42:31 PM	H2 MFC set to  0.000000
11/12/2010	2:42:31 PM	BCl3 MFC set to  0.000000
11/12/2010	2:42:31 PM	PHl3 MFC set to  0.000000
11/12/2010	2:42:31 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:42:31 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:42:31 PM	Tube furnace set to 0
11/12/2010	2:43:31 PM	Helium valve closed
11/12/2010	2:43:31 PM	H2 valve closed
11/12/2010	2:43:31 PM	BCl3 valve closed
11/12/2010	2:43:31 PM	PH3 valve closed
11/12/2010	2:43:31 PM	SiCl4 pre valve closed
11/12/2010	2:43:31 PM	SiCl4 post valve closed
11/12/2010	2:43:31 PM	Bubbler valve closed
11/12/2010	2:43:31 PM	Main Vac valve opened
11/12/2010	2:43:31 PM	Bypass valve opened
11/12/2010	2:43:31 PM	Helium MFC set to  0.000000
11/12/2010	2:43:31 PM	H2 MFC set to  0.000000
11/12/2010	2:43:31 PM	BCl3 MFC set to  0.000000
11/12/2010	2:43:31 PM	PHl3 MFC set to  0.000000
11/12/2010	2:43:31 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:43:31 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:43:31 PM	Tube furnace set to 0
11/12/2010	2:44:31 PM	H2 valve closed
11/12/2010	2:44:31 PM	BCl3 valve closed
11/12/2010	2:44:31 PM	PH3 valve closed
11/12/2010	2:44:31 PM	SiCl4 pre valve closed
11/12/2010	2:44:31 PM	SiCl4 post valve closed
11/12/2010	2:44:31 PM	Bubbler valve closed
11/12/2010	2:44:31 PM	Helium valve opened
11/12/2010	2:44:31 PM	Main Vac valve opened
11/12/2010	2:44:31 PM	Bypass valve opened
11/12/2010	2:44:31 PM	Helium MFC set to  100.000000
11/12/2010	2:44:31 PM	H2 MFC set to  0.000000
11/12/2010	2:44:31 PM	BCl3 MFC set to  0.000000
11/12/2010	2:44:31 PM	PHl3 MFC set to  0.000000
11/12/2010	2:44:31 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:44:31 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:44:31 PM	Tube furnace set to 0
11/12/2010	2:45:31 PM	Helium valve closed
11/12/2010	2:45:31 PM	H2 valve closed
11/12/2010	2:45:31 PM	BCl3 valve closed
11/12/2010	2:45:31 PM	PH3 valve closed
11/12/2010	2:45:31 PM	SiCl4 pre valve closed
11/12/2010	2:45:31 PM	SiCl4 post valve closed
11/12/2010	2:45:31 PM	Bubbler valve closed
11/12/2010	2:45:31 PM	Main Vac valve opened
11/12/2010	2:45:31 PM	Bypass valve opened
11/12/2010	2:45:31 PM	Helium MFC set to  0.000000
11/12/2010	2:45:31 PM	H2 MFC set to  0.000000
11/12/2010	2:45:31 PM	BCl3 MFC set to  0.000000
11/12/2010	2:45:31 PM	PHl3 MFC set to  0.000000
11/12/2010	2:45:31 PM	SiCl4 MFC set to  0.000000
11/12/2010	2:45:31 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	2:45:31 PM	Tube furnace set to 0
11/12/2010	2:45:32 PM	Run finished at 2:45 PM
11/12/2010	2:45:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	3:14:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	3:14:43 PM	Recipe started at 3:14 PM
11/12/2010	3:14:43 PM	Helium valve closed
11/12/2010	3:14:43 PM	H2 valve closed
11/12/2010	3:14:43 PM	BCl3 valve closed
11/12/2010	3:14:43 PM	PH3 valve closed
11/12/2010	3:14:43 PM	SiCl4 pre valve closed
11/12/2010	3:14:43 PM	SiCl4 post valve closed
11/12/2010	3:14:43 PM	Main Vac valve closed
11/12/2010	3:14:43 PM	Bubbler valve closed
11/12/2010	3:14:43 PM	Bypass valve opened
11/12/2010	3:14:43 PM	Helium MFC set to  0.000000
11/12/2010	3:14:43 PM	H2 MFC set to  0.000000
11/12/2010	3:14:43 PM	BCl3 MFC set to  0.000000
11/12/2010	3:14:43 PM	PHl3 MFC set to  0.000000
11/12/2010	3:14:43 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:14:43 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:14:44 PM	Tube furnace set to 0
11/12/2010	3:14:44 PM	Helium valve closed
11/12/2010	3:14:44 PM	H2 valve closed
11/12/2010	3:14:44 PM	BCl3 valve closed
11/12/2010	3:14:44 PM	PH3 valve closed
11/12/2010	3:14:44 PM	SiCl4 pre valve closed
11/12/2010	3:14:44 PM	SiCl4 post valve closed
11/12/2010	3:14:44 PM	Bubbler valve closed
11/12/2010	3:14:44 PM	Main Vac valve opened
11/12/2010	3:14:44 PM	Bypass valve opened
11/12/2010	3:14:44 PM	Helium MFC set to  0.000000
11/12/2010	3:14:44 PM	H2 MFC set to  0.000000
11/12/2010	3:14:44 PM	BCl3 MFC set to  0.000000
11/12/2010	3:14:44 PM	PHl3 MFC set to  0.000000
11/12/2010	3:14:44 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:14:44 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:14:44 PM	Tube furnace set to 0
11/12/2010	3:15:44 PM	H2 valve closed
11/12/2010	3:15:44 PM	BCl3 valve closed
11/12/2010	3:15:44 PM	PH3 valve closed
11/12/2010	3:15:44 PM	SiCl4 pre valve closed
11/12/2010	3:15:44 PM	SiCl4 post valve closed
11/12/2010	3:15:44 PM	Bubbler valve closed
11/12/2010	3:15:44 PM	Helium valve opened
11/12/2010	3:15:44 PM	Main Vac valve opened
11/12/2010	3:15:44 PM	Bypass valve opened
11/12/2010	3:15:44 PM	Helium MFC set to  100.000000
11/12/2010	3:15:44 PM	H2 MFC set to  0.000000
11/12/2010	3:15:44 PM	BCl3 MFC set to  0.000000
11/12/2010	3:15:44 PM	PHl3 MFC set to  0.000000
11/12/2010	3:15:44 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:15:44 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:15:44 PM	Tube furnace set to 0
11/12/2010	3:16:44 PM	Helium valve closed
11/12/2010	3:16:44 PM	H2 valve closed
11/12/2010	3:16:44 PM	BCl3 valve closed
11/12/2010	3:16:44 PM	PH3 valve closed
11/12/2010	3:16:44 PM	SiCl4 pre valve closed
11/12/2010	3:16:44 PM	SiCl4 post valve closed
11/12/2010	3:16:44 PM	Bubbler valve closed
11/12/2010	3:16:44 PM	Main Vac valve opened
11/12/2010	3:16:44 PM	Bypass valve opened
11/12/2010	3:16:44 PM	Helium MFC set to  0.000000
11/12/2010	3:16:44 PM	H2 MFC set to  0.000000
11/12/2010	3:16:44 PM	BCl3 MFC set to  0.000000
11/12/2010	3:16:44 PM	PHl3 MFC set to  0.000000
11/12/2010	3:16:44 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:16:44 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:16:44 PM	Tube furnace set to 0
11/12/2010	3:17:44 PM	H2 valve closed
11/12/2010	3:17:44 PM	BCl3 valve closed
11/12/2010	3:17:44 PM	PH3 valve closed
11/12/2010	3:17:44 PM	SiCl4 pre valve closed
11/12/2010	3:17:44 PM	SiCl4 post valve closed
11/12/2010	3:17:44 PM	Bubbler valve closed
11/12/2010	3:17:45 PM	Helium valve opened
11/12/2010	3:17:45 PM	Main Vac valve opened
11/12/2010	3:17:45 PM	Bypass valve opened
11/12/2010	3:17:45 PM	Helium MFC set to  100.000000
11/12/2010	3:17:45 PM	H2 MFC set to  0.000000
11/12/2010	3:17:45 PM	BCl3 MFC set to  0.000000
11/12/2010	3:17:45 PM	PHl3 MFC set to  0.000000
11/12/2010	3:17:45 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:17:45 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:17:45 PM	Tube furnace set to 0
11/12/2010	3:18:45 PM	Helium valve closed
11/12/2010	3:18:45 PM	H2 valve closed
11/12/2010	3:18:45 PM	BCl3 valve closed
11/12/2010	3:18:45 PM	PH3 valve closed
11/12/2010	3:18:45 PM	SiCl4 pre valve closed
11/12/2010	3:18:45 PM	SiCl4 post valve closed
11/12/2010	3:18:45 PM	Bubbler valve closed
11/12/2010	3:18:45 PM	Main Vac valve opened
11/12/2010	3:18:45 PM	Bypass valve opened
11/12/2010	3:18:45 PM	Helium MFC set to  0.000000
11/12/2010	3:18:45 PM	H2 MFC set to  0.000000
11/12/2010	3:18:45 PM	BCl3 MFC set to  0.000000
11/12/2010	3:18:45 PM	PHl3 MFC set to  0.000000
11/12/2010	3:18:45 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:18:45 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:18:45 PM	Tube furnace set to 0
11/12/2010	3:19:45 PM	H2 valve closed
11/12/2010	3:19:45 PM	BCl3 valve closed
11/12/2010	3:19:45 PM	PH3 valve closed
11/12/2010	3:19:45 PM	SiCl4 pre valve closed
11/12/2010	3:19:45 PM	SiCl4 post valve closed
11/12/2010	3:19:45 PM	Bubbler valve closed
11/12/2010	3:19:45 PM	Helium valve opened
11/12/2010	3:19:45 PM	Main Vac valve opened
11/12/2010	3:19:45 PM	Bypass valve opened
11/12/2010	3:19:45 PM	Helium MFC set to  100.000000
11/12/2010	3:19:45 PM	H2 MFC set to  0.000000
11/12/2010	3:19:45 PM	BCl3 MFC set to  0.000000
11/12/2010	3:19:45 PM	PHl3 MFC set to  0.000000
11/12/2010	3:19:45 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:19:45 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:19:45 PM	Tube furnace set to 0
11/12/2010	3:20:45 PM	Helium valve closed
11/12/2010	3:20:45 PM	H2 valve closed
11/12/2010	3:20:45 PM	BCl3 valve closed
11/12/2010	3:20:45 PM	PH3 valve closed
11/12/2010	3:20:45 PM	SiCl4 pre valve closed
11/12/2010	3:20:45 PM	SiCl4 post valve closed
11/12/2010	3:20:45 PM	Bubbler valve closed
11/12/2010	3:20:45 PM	Main Vac valve opened
11/12/2010	3:20:45 PM	Bypass valve opened
11/12/2010	3:20:45 PM	Helium MFC set to  0.000000
11/12/2010	3:20:45 PM	H2 MFC set to  0.000000
11/12/2010	3:20:45 PM	BCl3 MFC set to  0.000000
11/12/2010	3:20:45 PM	PHl3 MFC set to  0.000000
11/12/2010	3:20:45 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:20:45 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:20:45 PM	Tube furnace set to 0
11/12/2010	3:21:45 PM	H2 valve closed
11/12/2010	3:21:45 PM	BCl3 valve closed
11/12/2010	3:21:45 PM	PH3 valve closed
11/12/2010	3:21:45 PM	SiCl4 pre valve closed
11/12/2010	3:21:45 PM	SiCl4 post valve closed
11/12/2010	3:21:45 PM	Bubbler valve closed
11/12/2010	3:21:45 PM	Helium valve opened
11/12/2010	3:21:45 PM	Main Vac valve opened
11/12/2010	3:21:45 PM	Bypass valve opened
11/12/2010	3:21:45 PM	Helium MFC set to  100.000000
11/12/2010	3:21:45 PM	H2 MFC set to  0.000000
11/12/2010	3:21:45 PM	BCl3 MFC set to  0.000000
11/12/2010	3:21:45 PM	PHl3 MFC set to  0.000000
11/12/2010	3:21:45 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:21:45 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:21:45 PM	Tube furnace set to 0
11/12/2010	3:22:45 PM	Helium valve closed
11/12/2010	3:22:45 PM	H2 valve closed
11/12/2010	3:22:45 PM	BCl3 valve closed
11/12/2010	3:22:45 PM	PH3 valve closed
11/12/2010	3:22:45 PM	SiCl4 pre valve closed
11/12/2010	3:22:45 PM	SiCl4 post valve closed
11/12/2010	3:22:45 PM	Bubbler valve closed
11/12/2010	3:22:45 PM	Main Vac valve opened
11/12/2010	3:22:46 PM	Bypass valve opened
11/12/2010	3:22:46 PM	Helium MFC set to  0.000000
11/12/2010	3:22:46 PM	H2 MFC set to  0.000000
11/12/2010	3:22:46 PM	BCl3 MFC set to  0.000000
11/12/2010	3:22:46 PM	PHl3 MFC set to  0.000000
11/12/2010	3:22:46 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:22:46 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:22:46 PM	Tube furnace set to 0
11/12/2010	3:23:46 PM	H2 valve closed
11/12/2010	3:23:46 PM	BCl3 valve closed
11/12/2010	3:23:46 PM	PH3 valve closed
11/12/2010	3:23:46 PM	SiCl4 pre valve closed
11/12/2010	3:23:46 PM	SiCl4 post valve closed
11/12/2010	3:23:46 PM	Bubbler valve closed
11/12/2010	3:23:46 PM	Helium valve opened
11/12/2010	3:23:46 PM	Main Vac valve opened
11/12/2010	3:23:46 PM	Bypass valve opened
11/12/2010	3:23:46 PM	Helium MFC set to  100.000000
11/12/2010	3:23:46 PM	H2 MFC set to  0.000000
11/12/2010	3:23:46 PM	BCl3 MFC set to  0.000000
11/12/2010	3:23:46 PM	PHl3 MFC set to  0.000000
11/12/2010	3:23:46 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:23:46 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:23:46 PM	Tube furnace set to 0
11/12/2010	3:24:46 PM	Helium valve closed
11/12/2010	3:24:46 PM	H2 valve closed
11/12/2010	3:24:46 PM	BCl3 valve closed
11/12/2010	3:24:46 PM	PH3 valve closed
11/12/2010	3:24:46 PM	SiCl4 pre valve closed
11/12/2010	3:24:46 PM	SiCl4 post valve closed
11/12/2010	3:24:46 PM	Bubbler valve closed
11/12/2010	3:24:46 PM	Main Vac valve opened
11/12/2010	3:24:46 PM	Bypass valve opened
11/12/2010	3:24:46 PM	Helium MFC set to  0.000000
11/12/2010	3:24:46 PM	H2 MFC set to  0.000000
11/12/2010	3:24:46 PM	BCl3 MFC set to  0.000000
11/12/2010	3:24:46 PM	PHl3 MFC set to  0.000000
11/12/2010	3:24:46 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:24:46 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:24:46 PM	Tube furnace set to 0
11/12/2010	3:25:46 PM	H2 valve closed
11/12/2010	3:25:46 PM	BCl3 valve closed
11/12/2010	3:25:46 PM	PH3 valve closed
11/12/2010	3:25:46 PM	SiCl4 pre valve closed
11/12/2010	3:25:46 PM	SiCl4 post valve closed
11/12/2010	3:25:46 PM	Bubbler valve closed
11/12/2010	3:25:46 PM	Helium valve opened
11/12/2010	3:25:46 PM	Main Vac valve opened
11/12/2010	3:25:46 PM	Bypass valve opened
11/12/2010	3:25:46 PM	Helium MFC set to  100.000000
11/12/2010	3:25:46 PM	H2 MFC set to  0.000000
11/12/2010	3:25:46 PM	BCl3 MFC set to  0.000000
11/12/2010	3:25:46 PM	PHl3 MFC set to  0.000000
11/12/2010	3:25:46 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:25:46 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:25:46 PM	Tube furnace set to 0
11/12/2010	3:26:46 PM	Helium valve closed
11/12/2010	3:26:46 PM	H2 valve closed
11/12/2010	3:26:46 PM	BCl3 valve closed
11/12/2010	3:26:46 PM	PH3 valve closed
11/12/2010	3:26:46 PM	SiCl4 pre valve closed
11/12/2010	3:26:46 PM	SiCl4 post valve closed
11/12/2010	3:26:46 PM	Bubbler valve closed
11/12/2010	3:26:46 PM	Main Vac valve opened
11/12/2010	3:26:46 PM	Bypass valve opened
11/12/2010	3:26:46 PM	Helium MFC set to  0.000000
11/12/2010	3:26:46 PM	H2 MFC set to  0.000000
11/12/2010	3:26:46 PM	BCl3 MFC set to  0.000000
11/12/2010	3:26:46 PM	PHl3 MFC set to  0.000000
11/12/2010	3:26:46 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:26:46 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:26:46 PM	Tube furnace set to 0
11/12/2010	3:27:46 PM	H2 valve closed
11/12/2010	3:27:46 PM	BCl3 valve closed
11/12/2010	3:27:46 PM	PH3 valve closed
11/12/2010	3:27:46 PM	SiCl4 pre valve closed
11/12/2010	3:27:46 PM	SiCl4 post valve closed
11/12/2010	3:27:46 PM	Bubbler valve closed
11/12/2010	3:27:46 PM	Helium valve opened
11/12/2010	3:27:46 PM	Main Vac valve opened
11/12/2010	3:27:46 PM	Bypass valve opened
11/12/2010	3:27:46 PM	Helium MFC set to  100.000000
11/12/2010	3:27:47 PM	H2 MFC set to  0.000000
11/12/2010	3:27:47 PM	BCl3 MFC set to  0.000000
11/12/2010	3:27:47 PM	PHl3 MFC set to  0.000000
11/12/2010	3:27:47 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:27:47 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:27:47 PM	Tube furnace set to 0
11/12/2010	3:28:47 PM	Helium valve closed
11/12/2010	3:28:47 PM	H2 valve closed
11/12/2010	3:28:47 PM	BCl3 valve closed
11/12/2010	3:28:47 PM	PH3 valve closed
11/12/2010	3:28:47 PM	SiCl4 pre valve closed
11/12/2010	3:28:47 PM	SiCl4 post valve closed
11/12/2010	3:28:47 PM	Bubbler valve closed
11/12/2010	3:28:47 PM	Main Vac valve opened
11/12/2010	3:28:47 PM	Bypass valve opened
11/12/2010	3:28:47 PM	Helium MFC set to  0.000000
11/12/2010	3:28:47 PM	H2 MFC set to  0.000000
11/12/2010	3:28:47 PM	BCl3 MFC set to  0.000000
11/12/2010	3:28:47 PM	PHl3 MFC set to  0.000000
11/12/2010	3:28:47 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:28:47 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:28:47 PM	Tube furnace set to 0
11/12/2010	3:29:47 PM	H2 valve closed
11/12/2010	3:29:47 PM	BCl3 valve closed
11/12/2010	3:29:47 PM	PH3 valve closed
11/12/2010	3:29:47 PM	SiCl4 pre valve closed
11/12/2010	3:29:47 PM	SiCl4 post valve closed
11/12/2010	3:29:47 PM	Bubbler valve closed
11/12/2010	3:29:47 PM	Helium valve opened
11/12/2010	3:29:47 PM	Main Vac valve opened
11/12/2010	3:29:47 PM	Bypass valve opened
11/12/2010	3:29:47 PM	Helium MFC set to  100.000000
11/12/2010	3:29:47 PM	H2 MFC set to  0.000000
11/12/2010	3:29:47 PM	BCl3 MFC set to  0.000000
11/12/2010	3:29:47 PM	PHl3 MFC set to  0.000000
11/12/2010	3:29:47 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:29:47 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:29:47 PM	Tube furnace set to 0
11/12/2010	3:30:47 PM	Helium valve closed
11/12/2010	3:30:47 PM	H2 valve closed
11/12/2010	3:30:47 PM	BCl3 valve closed
11/12/2010	3:30:47 PM	PH3 valve closed
11/12/2010	3:30:47 PM	SiCl4 pre valve closed
11/12/2010	3:30:47 PM	SiCl4 post valve closed
11/12/2010	3:30:47 PM	Bubbler valve closed
11/12/2010	3:30:47 PM	Main Vac valve opened
11/12/2010	3:30:47 PM	Bypass valve opened
11/12/2010	3:30:47 PM	Helium MFC set to  0.000000
11/12/2010	3:30:47 PM	H2 MFC set to  0.000000
11/12/2010	3:30:47 PM	BCl3 MFC set to  0.000000
11/12/2010	3:30:47 PM	PHl3 MFC set to  0.000000
11/12/2010	3:30:47 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:30:47 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:30:47 PM	Tube furnace set to 0
11/12/2010	3:31:47 PM	H2 valve closed
11/12/2010	3:31:47 PM	BCl3 valve closed
11/12/2010	3:31:47 PM	PH3 valve closed
11/12/2010	3:31:47 PM	SiCl4 pre valve closed
11/12/2010	3:31:47 PM	SiCl4 post valve closed
11/12/2010	3:31:47 PM	Bubbler valve closed
11/12/2010	3:31:47 PM	Helium valve opened
11/12/2010	3:31:47 PM	Main Vac valve opened
11/12/2010	3:31:47 PM	Bypass valve opened
11/12/2010	3:31:47 PM	Helium MFC set to  100.000000
11/12/2010	3:31:47 PM	H2 MFC set to  0.000000
11/12/2010	3:31:47 PM	BCl3 MFC set to  0.000000
11/12/2010	3:31:47 PM	PHl3 MFC set to  0.000000
11/12/2010	3:31:47 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:31:47 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:31:47 PM	Tube furnace set to 0
11/12/2010	3:32:47 PM	Helium valve closed
11/12/2010	3:32:47 PM	H2 valve closed
11/12/2010	3:32:47 PM	BCl3 valve closed
11/12/2010	3:32:47 PM	PH3 valve closed
11/12/2010	3:32:47 PM	SiCl4 pre valve closed
11/12/2010	3:32:47 PM	SiCl4 post valve closed
11/12/2010	3:32:47 PM	Bubbler valve closed
11/12/2010	3:32:47 PM	Main Vac valve opened
11/12/2010	3:32:47 PM	Bypass valve opened
11/12/2010	3:32:47 PM	Helium MFC set to  0.000000
11/12/2010	3:32:47 PM	H2 MFC set to  0.000000
11/12/2010	3:32:47 PM	BCl3 MFC set to  0.000000
11/12/2010	3:32:47 PM	PHl3 MFC set to  0.000000
11/12/2010	3:32:47 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:32:47 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:32:48 PM	Tube furnace set to 0
11/12/2010	3:33:48 PM	H2 valve closed
11/12/2010	3:33:48 PM	BCl3 valve closed
11/12/2010	3:33:48 PM	PH3 valve closed
11/12/2010	3:33:48 PM	SiCl4 pre valve closed
11/12/2010	3:33:48 PM	SiCl4 post valve closed
11/12/2010	3:33:48 PM	Bubbler valve closed
11/12/2010	3:33:48 PM	Helium valve opened
11/12/2010	3:33:48 PM	Main Vac valve opened
11/12/2010	3:33:48 PM	Bypass valve opened
11/12/2010	3:33:48 PM	Helium MFC set to  100.000000
11/12/2010	3:33:48 PM	H2 MFC set to  0.000000
11/12/2010	3:33:48 PM	BCl3 MFC set to  0.000000
11/12/2010	3:33:48 PM	PHl3 MFC set to  0.000000
11/12/2010	3:33:48 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:33:48 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:33:48 PM	Tube furnace set to 0
11/12/2010	3:34:48 PM	Helium valve closed
11/12/2010	3:34:48 PM	H2 valve closed
11/12/2010	3:34:48 PM	BCl3 valve closed
11/12/2010	3:34:48 PM	PH3 valve closed
11/12/2010	3:34:48 PM	SiCl4 pre valve closed
11/12/2010	3:34:48 PM	SiCl4 post valve closed
11/12/2010	3:34:48 PM	Bubbler valve closed
11/12/2010	3:34:48 PM	Main Vac valve opened
11/12/2010	3:34:48 PM	Bypass valve opened
11/12/2010	3:34:48 PM	Helium MFC set to  0.000000
11/12/2010	3:34:48 PM	H2 MFC set to  0.000000
11/12/2010	3:34:48 PM	BCl3 MFC set to  0.000000
11/12/2010	3:34:48 PM	PHl3 MFC set to  0.000000
11/12/2010	3:34:48 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:34:48 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:34:48 PM	Tube furnace set to 0
11/12/2010	3:34:49 PM	Run finished at 3:34 PM
11/12/2010	3:34:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	3:41:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	3:41:26 PM	Recipe started at 3:41 PM
11/12/2010	3:41:26 PM	Helium valve closed
11/12/2010	3:41:26 PM	H2 valve closed
11/12/2010	3:41:26 PM	BCl3 valve closed
11/12/2010	3:41:26 PM	PH3 valve closed
11/12/2010	3:41:26 PM	SiCl4 pre valve closed
11/12/2010	3:41:26 PM	SiCl4 post valve closed
11/12/2010	3:41:26 PM	Main Vac valve closed
11/12/2010	3:41:26 PM	Bubbler valve closed
11/12/2010	3:41:26 PM	Bypass valve opened
11/12/2010	3:41:26 PM	Helium MFC set to  0.000000
11/12/2010	3:41:26 PM	H2 MFC set to  0.000000
11/12/2010	3:41:26 PM	BCl3 MFC set to  0.000000
11/12/2010	3:41:26 PM	PHl3 MFC set to  0.000000
11/12/2010	3:41:26 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:41:26 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:41:26 PM	Tube furnace set to 0
11/12/2010	3:41:27 PM	Helium valve closed
11/12/2010	3:41:27 PM	H2 valve closed
11/12/2010	3:41:27 PM	BCl3 valve closed
11/12/2010	3:41:27 PM	PH3 valve closed
11/12/2010	3:41:27 PM	SiCl4 pre valve closed
11/12/2010	3:41:27 PM	SiCl4 post valve closed
11/12/2010	3:41:27 PM	Bubbler valve closed
11/12/2010	3:41:27 PM	Main Vac valve opened
11/12/2010	3:41:27 PM	Bypass valve opened
11/12/2010	3:41:27 PM	Helium MFC set to  0.000000
11/12/2010	3:41:27 PM	H2 MFC set to  0.000000
11/12/2010	3:41:27 PM	BCl3 MFC set to  0.000000
11/12/2010	3:41:27 PM	PHl3 MFC set to  0.000000
11/12/2010	3:41:27 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:41:27 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:41:27 PM	Tube furnace set to 0
11/12/2010	3:42:27 PM	H2 valve closed
11/12/2010	3:42:27 PM	BCl3 valve closed
11/12/2010	3:42:27 PM	PH3 valve closed
11/12/2010	3:42:27 PM	SiCl4 pre valve closed
11/12/2010	3:42:27 PM	SiCl4 post valve closed
11/12/2010	3:42:27 PM	Bubbler valve closed
11/12/2010	3:42:27 PM	Helium valve opened
11/12/2010	3:42:27 PM	Main Vac valve opened
11/12/2010	3:42:27 PM	Bypass valve opened
11/12/2010	3:42:27 PM	Helium MFC set to  100.000000
11/12/2010	3:42:27 PM	H2 MFC set to  0.000000
11/12/2010	3:42:27 PM	BCl3 MFC set to  0.000000
11/12/2010	3:42:27 PM	PHl3 MFC set to  0.000000
11/12/2010	3:42:27 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:42:27 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:42:27 PM	Tube furnace set to 0
11/12/2010	3:43:27 PM	Helium valve closed
11/12/2010	3:43:27 PM	H2 valve closed
11/12/2010	3:43:27 PM	BCl3 valve closed
11/12/2010	3:43:27 PM	PH3 valve closed
11/12/2010	3:43:27 PM	SiCl4 pre valve closed
11/12/2010	3:43:27 PM	SiCl4 post valve closed
11/12/2010	3:43:27 PM	Bubbler valve closed
11/12/2010	3:43:27 PM	Main Vac valve opened
11/12/2010	3:43:27 PM	Bypass valve opened
11/12/2010	3:43:27 PM	Helium MFC set to  0.000000
11/12/2010	3:43:27 PM	H2 MFC set to  0.000000
11/12/2010	3:43:27 PM	BCl3 MFC set to  0.000000
11/12/2010	3:43:27 PM	PHl3 MFC set to  0.000000
11/12/2010	3:43:27 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:43:27 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:43:27 PM	Tube furnace set to 0
11/12/2010	3:43:40 PM	Run aborted at 3:43 PM
11/12/2010	3:43:40 PM	Helium valve closed
11/12/2010	3:43:40 PM	H2 valve closed
11/12/2010	3:43:40 PM	BCl3 valve closed
11/12/2010	3:43:40 PM	PH3 valve closed
11/12/2010	3:43:40 PM	SiCl4 pre valve closed
11/12/2010	3:43:40 PM	SiCl4 post valve closed
11/12/2010	3:43:40 PM	Bypass valve closed
11/12/2010	3:43:40 PM	Main Vac valve closed
11/12/2010	3:43:40 PM	Bubbler valve closed
11/12/2010	3:43:40 PM	Helium MFC set to  0.000000
11/12/2010	3:43:40 PM	H2 MFC set to  0.000000
11/12/2010	3:43:40 PM	BCl3 MFC set to  0.000000
11/12/2010	3:43:40 PM	PHl3 MFC set to  0.000000
11/12/2010	3:43:40 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:43:40 PM	Tube furnace set to 0
11/12/2010	3:43:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	3:43:42 PM	Bypass valve opened
11/12/2010	3:43:44 PM	Main Vac valve opened
11/12/2010	3:49:05 PM	Bypass valve closed
11/12/2010	3:49:06 PM	Main Vac valve closed
11/12/2010	3:49:21 PM	Bypass valve opened
11/12/2010	3:49:21 PM	Main Vac valve opened
11/12/2010	3:49:40 PM	Recipe started at 3:49 PM
11/12/2010	3:49:40 PM	Helium valve closed
11/12/2010	3:49:40 PM	BCl3 valve closed
11/12/2010	3:49:40 PM	PH3 valve closed
11/12/2010	3:49:40 PM	SiCl4 pre valve closed
11/12/2010	3:49:40 PM	SiCl4 post valve closed
11/12/2010	3:49:40 PM	Main Vac valve closed
11/12/2010	3:49:40 PM	Bypass valve closed
11/12/2010	3:49:40 PM	Bubbler valve closed
11/12/2010	3:49:40 PM	H2 valve opened
11/12/2010	3:49:40 PM	Helium MFC set to  0.000000
11/12/2010	3:49:40 PM	H2 MFC set to  500.000000
11/12/2010	3:49:40 PM	BCl3 MFC set to  0.000000
11/12/2010	3:49:40 PM	PHl3 MFC set to  0.000000
11/12/2010	3:49:40 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:49:40 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:49:40 PM	Tube furnace set to 0
11/12/2010	3:51:01 PM	Helium valve closed
11/12/2010	3:51:01 PM	BCl3 valve closed
11/12/2010	3:51:01 PM	PH3 valve closed
11/12/2010	3:51:01 PM	SiCl4 pre valve closed
11/12/2010	3:51:01 PM	SiCl4 post valve closed
11/12/2010	3:51:01 PM	Main Vac valve closed
11/12/2010	3:51:01 PM	Bypass valve closed
11/12/2010	3:51:01 PM	H2 valve opened
11/12/2010	3:51:01 PM	Bubbler valve opened
11/12/2010	3:51:01 PM	Helium MFC set to  0.000000
11/12/2010	3:51:01 PM	H2 MFC set to  500.000000
11/12/2010	3:51:01 PM	BCl3 MFC set to  0.000000
11/12/2010	3:51:01 PM	PHl3 MFC set to  0.000000
11/12/2010	3:51:01 PM	SiCl4 MFC set to  0.000000
11/12/2010	3:51:01 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	3:51:01 PM	Tube furnace set to 1000
11/12/2010	4:11:01 PM	Helium valve closed
11/12/2010	4:11:01 PM	BCl3 valve closed
11/12/2010	4:11:01 PM	Main Vac valve closed
11/12/2010	4:11:01 PM	Bypass valve closed
11/12/2010	4:11:01 PM	H2 valve opened
11/12/2010	4:11:01 PM	PH3 valve opened
11/12/2010	4:11:01 PM	SiCl4 pre valve opened
11/12/2010	4:11:01 PM	SiCl4 post valve opened
11/12/2010	4:11:01 PM	Bubbler valve opened
11/12/2010	4:11:02 PM	Helium MFC set to  0.000000
11/12/2010	4:11:02 PM	H2 MFC set to  500.000000
11/12/2010	4:11:02 PM	BCl3 MFC set to  0.000000
11/12/2010	4:11:02 PM	PHl3 MFC set to  1.000000
11/12/2010	4:11:02 PM	SiCl4 MFC set to  50.000000
11/12/2010	4:11:02 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	4:11:02 PM	Tube furnace set to 1000
11/12/2010	4:41:02 PM	H2 valve closed
11/12/2010	4:41:02 PM	BCl3 valve closed
11/12/2010	4:41:02 PM	PH3 valve closed
11/12/2010	4:41:02 PM	SiCl4 pre valve closed
11/12/2010	4:41:02 PM	SiCl4 post valve closed
11/12/2010	4:41:02 PM	Main Vac valve closed
11/12/2010	4:41:02 PM	Bypass valve closed
11/12/2010	4:41:02 PM	Helium valve opened
11/12/2010	4:41:02 PM	Bubbler valve opened
11/12/2010	4:41:02 PM	Helium MFC set to  500.000000
11/12/2010	4:41:02 PM	H2 MFC set to  0.000000
11/12/2010	4:41:02 PM	BCl3 MFC set to  0.000000
11/12/2010	4:41:02 PM	PHl3 MFC set to  0.000000
11/12/2010	4:41:02 PM	SiCl4 MFC set to  0.000000
11/12/2010	4:41:02 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	4:41:02 PM	Tube furnace set to 0
11/12/2010	5:01:02 PM	Helium valve closed
11/12/2010	5:01:02 PM	H2 valve closed
11/12/2010	5:01:02 PM	BCl3 valve closed
11/12/2010	5:01:02 PM	PH3 valve closed
11/12/2010	5:01:02 PM	SiCl4 pre valve closed
11/12/2010	5:01:02 PM	SiCl4 post valve closed
11/12/2010	5:01:02 PM	Main Vac valve closed
11/12/2010	5:01:02 PM	Bypass valve closed
11/12/2010	5:01:02 PM	Bubbler valve closed
11/12/2010	5:01:02 PM	Helium MFC set to  0.000000
11/12/2010	5:01:02 PM	H2 MFC set to  0.000000
11/12/2010	5:01:02 PM	BCl3 MFC set to  0.000000
11/12/2010	5:01:02 PM	PHl3 MFC set to  0.000000
11/12/2010	5:01:02 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:01:02 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:01:02 PM	Tube furnace set to 0
11/12/2010	5:01:02 PM	Run finished at 5:01 PM
11/12/2010	5:37:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2010	5:37:54 PM	Recipe started at 5:37 PM
11/12/2010	5:37:54 PM	Helium valve closed
11/12/2010	5:37:54 PM	H2 valve closed
11/12/2010	5:37:54 PM	BCl3 valve closed
11/12/2010	5:37:54 PM	PH3 valve closed
11/12/2010	5:37:54 PM	SiCl4 pre valve closed
11/12/2010	5:37:54 PM	SiCl4 post valve closed
11/12/2010	5:37:54 PM	Main Vac valve closed
11/12/2010	5:37:54 PM	Bubbler valve closed
11/12/2010	5:37:54 PM	Bypass valve opened
11/12/2010	5:37:54 PM	Helium MFC set to  0.000000
11/12/2010	5:37:54 PM	H2 MFC set to  0.000000
11/12/2010	5:37:54 PM	BCl3 MFC set to  0.000000
11/12/2010	5:37:54 PM	PHl3 MFC set to  0.000000
11/12/2010	5:37:54 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:37:54 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:37:54 PM	Tube furnace set to 0
11/12/2010	5:38:48 PM	Helium valve closed
11/12/2010	5:38:48 PM	H2 valve closed
11/12/2010	5:38:48 PM	BCl3 valve closed
11/12/2010	5:38:48 PM	PH3 valve closed
11/12/2010	5:38:48 PM	SiCl4 pre valve closed
11/12/2010	5:38:48 PM	SiCl4 post valve closed
11/12/2010	5:38:48 PM	Bubbler valve closed
11/12/2010	5:38:48 PM	Main Vac valve opened
11/12/2010	5:38:48 PM	Bypass valve opened
11/12/2010	5:38:48 PM	Helium MFC set to  0.000000
11/12/2010	5:38:48 PM	H2 MFC set to  0.000000
11/12/2010	5:38:48 PM	BCl3 MFC set to  0.000000
11/12/2010	5:38:48 PM	PHl3 MFC set to  0.000000
11/12/2010	5:38:48 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:38:48 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:38:48 PM	Tube furnace set to 0
11/12/2010	5:38:48 PM	Run finished at 5:38 PM
11/12/2010	5:38:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2010	5:39:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	5:39:25 PM	Recipe started at 5:39 PM
11/12/2010	5:39:25 PM	Helium valve closed
11/12/2010	5:39:25 PM	H2 valve closed
11/12/2010	5:39:25 PM	BCl3 valve closed
11/12/2010	5:39:25 PM	PH3 valve closed
11/12/2010	5:39:25 PM	SiCl4 pre valve closed
11/12/2010	5:39:25 PM	SiCl4 post valve closed
11/12/2010	5:39:25 PM	Main Vac valve closed
11/12/2010	5:39:25 PM	Bubbler valve closed
11/12/2010	5:39:25 PM	Bypass valve opened
11/12/2010	5:39:25 PM	Helium MFC set to  0.000000
11/12/2010	5:39:25 PM	H2 MFC set to  0.000000
11/12/2010	5:39:25 PM	BCl3 MFC set to  0.000000
11/12/2010	5:39:25 PM	PHl3 MFC set to  0.000000
11/12/2010	5:39:25 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:39:25 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:39:25 PM	Tube furnace set to 0
11/12/2010	5:39:25 PM	Helium valve closed
11/12/2010	5:39:25 PM	H2 valve closed
11/12/2010	5:39:25 PM	BCl3 valve closed
11/12/2010	5:39:25 PM	PH3 valve closed
11/12/2010	5:39:25 PM	SiCl4 pre valve closed
11/12/2010	5:39:25 PM	SiCl4 post valve closed
11/12/2010	5:39:25 PM	Bubbler valve closed
11/12/2010	5:39:25 PM	Main Vac valve opened
11/12/2010	5:39:25 PM	Bypass valve opened
11/12/2010	5:39:25 PM	Helium MFC set to  0.000000
11/12/2010	5:39:25 PM	H2 MFC set to  0.000000
11/12/2010	5:39:25 PM	BCl3 MFC set to  0.000000
11/12/2010	5:39:25 PM	PHl3 MFC set to  0.000000
11/12/2010	5:39:25 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:39:25 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:39:25 PM	Tube furnace set to 0
11/12/2010	5:40:25 PM	H2 valve closed
11/12/2010	5:40:25 PM	BCl3 valve closed
11/12/2010	5:40:25 PM	PH3 valve closed
11/12/2010	5:40:25 PM	SiCl4 pre valve closed
11/12/2010	5:40:25 PM	SiCl4 post valve closed
11/12/2010	5:40:25 PM	Bubbler valve closed
11/12/2010	5:40:25 PM	Helium valve opened
11/12/2010	5:40:25 PM	Main Vac valve opened
11/12/2010	5:40:25 PM	Bypass valve opened
11/12/2010	5:40:25 PM	Helium MFC set to  100.000000
11/12/2010	5:40:25 PM	H2 MFC set to  0.000000
11/12/2010	5:40:25 PM	BCl3 MFC set to  0.000000
11/12/2010	5:40:25 PM	PHl3 MFC set to  0.000000
11/12/2010	5:40:25 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:40:25 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:40:25 PM	Tube furnace set to 0
11/12/2010	5:41:25 PM	Helium valve closed
11/12/2010	5:41:25 PM	H2 valve closed
11/12/2010	5:41:25 PM	BCl3 valve closed
11/12/2010	5:41:25 PM	PH3 valve closed
11/12/2010	5:41:25 PM	SiCl4 pre valve closed
11/12/2010	5:41:25 PM	SiCl4 post valve closed
11/12/2010	5:41:26 PM	Bubbler valve closed
11/12/2010	5:41:26 PM	Main Vac valve opened
11/12/2010	5:41:26 PM	Bypass valve opened
11/12/2010	5:41:26 PM	Helium MFC set to  0.000000
11/12/2010	5:41:26 PM	H2 MFC set to  0.000000
11/12/2010	5:41:26 PM	BCl3 MFC set to  0.000000
11/12/2010	5:41:26 PM	PHl3 MFC set to  0.000000
11/12/2010	5:41:26 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:41:26 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:41:26 PM	Tube furnace set to 0
11/12/2010	5:42:26 PM	H2 valve closed
11/12/2010	5:42:26 PM	BCl3 valve closed
11/12/2010	5:42:26 PM	PH3 valve closed
11/12/2010	5:42:26 PM	SiCl4 pre valve closed
11/12/2010	5:42:26 PM	SiCl4 post valve closed
11/12/2010	5:42:26 PM	Bubbler valve closed
11/12/2010	5:42:26 PM	Helium valve opened
11/12/2010	5:42:26 PM	Main Vac valve opened
11/12/2010	5:42:26 PM	Bypass valve opened
11/12/2010	5:42:26 PM	Helium MFC set to  100.000000
11/12/2010	5:42:26 PM	H2 MFC set to  0.000000
11/12/2010	5:42:26 PM	BCl3 MFC set to  0.000000
11/12/2010	5:42:26 PM	PHl3 MFC set to  0.000000
11/12/2010	5:42:26 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:42:26 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:42:26 PM	Tube furnace set to 0
11/12/2010	5:43:26 PM	Helium valve closed
11/12/2010	5:43:26 PM	H2 valve closed
11/12/2010	5:43:26 PM	BCl3 valve closed
11/12/2010	5:43:26 PM	PH3 valve closed
11/12/2010	5:43:26 PM	SiCl4 pre valve closed
11/12/2010	5:43:26 PM	SiCl4 post valve closed
11/12/2010	5:43:26 PM	Bubbler valve closed
11/12/2010	5:43:26 PM	Main Vac valve opened
11/12/2010	5:43:26 PM	Bypass valve opened
11/12/2010	5:43:26 PM	Helium MFC set to  0.000000
11/12/2010	5:43:26 PM	H2 MFC set to  0.000000
11/12/2010	5:43:26 PM	BCl3 MFC set to  0.000000
11/12/2010	5:43:26 PM	PHl3 MFC set to  0.000000
11/12/2010	5:43:26 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:43:26 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:43:26 PM	Tube furnace set to 0
11/12/2010	5:44:26 PM	H2 valve closed
11/12/2010	5:44:26 PM	BCl3 valve closed
11/12/2010	5:44:26 PM	PH3 valve closed
11/12/2010	5:44:26 PM	SiCl4 pre valve closed
11/12/2010	5:44:26 PM	SiCl4 post valve closed
11/12/2010	5:44:26 PM	Bubbler valve closed
11/12/2010	5:44:26 PM	Helium valve opened
11/12/2010	5:44:26 PM	Main Vac valve opened
11/12/2010	5:44:26 PM	Bypass valve opened
11/12/2010	5:44:26 PM	Helium MFC set to  100.000000
11/12/2010	5:44:26 PM	H2 MFC set to  0.000000
11/12/2010	5:44:26 PM	BCl3 MFC set to  0.000000
11/12/2010	5:44:26 PM	PHl3 MFC set to  0.000000
11/12/2010	5:44:26 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:44:26 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:44:26 PM	Tube furnace set to 0
11/12/2010	5:45:26 PM	Helium valve closed
11/12/2010	5:45:26 PM	H2 valve closed
11/12/2010	5:45:26 PM	BCl3 valve closed
11/12/2010	5:45:26 PM	PH3 valve closed
11/12/2010	5:45:26 PM	SiCl4 pre valve closed
11/12/2010	5:45:26 PM	SiCl4 post valve closed
11/12/2010	5:45:26 PM	Bubbler valve closed
11/12/2010	5:45:26 PM	Main Vac valve opened
11/12/2010	5:45:26 PM	Bypass valve opened
11/12/2010	5:45:26 PM	Helium MFC set to  0.000000
11/12/2010	5:45:26 PM	H2 MFC set to  0.000000
11/12/2010	5:45:26 PM	BCl3 MFC set to  0.000000
11/12/2010	5:45:26 PM	PHl3 MFC set to  0.000000
11/12/2010	5:45:26 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:45:26 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:45:26 PM	Tube furnace set to 0
11/12/2010	5:46:26 PM	H2 valve closed
11/12/2010	5:46:26 PM	BCl3 valve closed
11/12/2010	5:46:26 PM	PH3 valve closed
11/12/2010	5:46:26 PM	SiCl4 pre valve closed
11/12/2010	5:46:26 PM	SiCl4 post valve closed
11/12/2010	5:46:26 PM	Bubbler valve closed
11/12/2010	5:46:26 PM	Helium valve opened
11/12/2010	5:46:26 PM	Main Vac valve opened
11/12/2010	5:46:26 PM	Bypass valve opened
11/12/2010	5:46:26 PM	Helium MFC set to  100.000000
11/12/2010	5:46:26 PM	H2 MFC set to  0.000000
11/12/2010	5:46:26 PM	BCl3 MFC set to  0.000000
11/12/2010	5:46:26 PM	PHl3 MFC set to  0.000000
11/12/2010	5:46:26 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:46:26 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:46:27 PM	Tube furnace set to 0
11/12/2010	5:47:27 PM	Helium valve closed
11/12/2010	5:47:27 PM	H2 valve closed
11/12/2010	5:47:27 PM	BCl3 valve closed
11/12/2010	5:47:27 PM	PH3 valve closed
11/12/2010	5:47:27 PM	SiCl4 pre valve closed
11/12/2010	5:47:27 PM	SiCl4 post valve closed
11/12/2010	5:47:27 PM	Bubbler valve closed
11/12/2010	5:47:27 PM	Main Vac valve opened
11/12/2010	5:47:27 PM	Bypass valve opened
11/12/2010	5:47:27 PM	Helium MFC set to  0.000000
11/12/2010	5:47:27 PM	H2 MFC set to  0.000000
11/12/2010	5:47:27 PM	BCl3 MFC set to  0.000000
11/12/2010	5:47:27 PM	PHl3 MFC set to  0.000000
11/12/2010	5:47:27 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:47:27 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:47:27 PM	Tube furnace set to 0
11/12/2010	5:48:27 PM	H2 valve closed
11/12/2010	5:48:27 PM	BCl3 valve closed
11/12/2010	5:48:27 PM	PH3 valve closed
11/12/2010	5:48:27 PM	SiCl4 pre valve closed
11/12/2010	5:48:27 PM	SiCl4 post valve closed
11/12/2010	5:48:27 PM	Bubbler valve closed
11/12/2010	5:48:27 PM	Helium valve opened
11/12/2010	5:48:27 PM	Main Vac valve opened
11/12/2010	5:48:27 PM	Bypass valve opened
11/12/2010	5:48:27 PM	Helium MFC set to  100.000000
11/12/2010	5:48:27 PM	H2 MFC set to  0.000000
11/12/2010	5:48:27 PM	BCl3 MFC set to  0.000000
11/12/2010	5:48:27 PM	PHl3 MFC set to  0.000000
11/12/2010	5:48:27 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:48:27 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:48:27 PM	Tube furnace set to 0
11/12/2010	5:48:53 PM	Run aborted at 5:48 PM
11/12/2010	5:48:53 PM	Helium valve closed
11/12/2010	5:48:53 PM	H2 valve closed
11/12/2010	5:48:53 PM	BCl3 valve closed
11/12/2010	5:48:53 PM	PH3 valve closed
11/12/2010	5:48:53 PM	SiCl4 pre valve closed
11/12/2010	5:48:53 PM	SiCl4 post valve closed
11/12/2010	5:48:53 PM	Bypass valve closed
11/12/2010	5:48:53 PM	Main Vac valve closed
11/12/2010	5:48:53 PM	Bubbler valve closed
11/12/2010	5:48:53 PM	Helium MFC set to  0.000000
11/12/2010	5:48:53 PM	H2 MFC set to  0.000000
11/12/2010	5:48:53 PM	BCl3 MFC set to  0.000000
11/12/2010	5:48:53 PM	PHl3 MFC set to  0.000000
11/12/2010	5:48:53 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:48:53 PM	Tube furnace set to 0
11/12/2010	5:48:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	5:49:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	5:49:11 PM	Recipe started at 5:49 PM
11/12/2010	5:49:11 PM	Helium valve closed
11/12/2010	5:49:11 PM	H2 valve closed
11/12/2010	5:49:11 PM	BCl3 valve closed
11/12/2010	5:49:11 PM	PH3 valve closed
11/12/2010	5:49:11 PM	SiCl4 pre valve closed
11/12/2010	5:49:11 PM	SiCl4 post valve closed
11/12/2010	5:49:11 PM	Main Vac valve closed
11/12/2010	5:49:11 PM	Bubbler valve closed
11/12/2010	5:49:11 PM	Bypass valve opened
11/12/2010	5:49:11 PM	Helium MFC set to  0.000000
11/12/2010	5:49:11 PM	H2 MFC set to  0.000000
11/12/2010	5:49:11 PM	BCl3 MFC set to  0.000000
11/12/2010	5:49:11 PM	PHl3 MFC set to  0.000000
11/12/2010	5:49:11 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:49:11 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:49:11 PM	Tube furnace set to 0
11/12/2010	5:49:12 PM	Helium valve closed
11/12/2010	5:49:12 PM	H2 valve closed
11/12/2010	5:49:12 PM	BCl3 valve closed
11/12/2010	5:49:12 PM	PH3 valve closed
11/12/2010	5:49:12 PM	SiCl4 pre valve closed
11/12/2010	5:49:12 PM	SiCl4 post valve closed
11/12/2010	5:49:12 PM	Bubbler valve closed
11/12/2010	5:49:12 PM	Main Vac valve opened
11/12/2010	5:49:12 PM	Bypass valve opened
11/12/2010	5:49:12 PM	Helium MFC set to  0.000000
11/12/2010	5:49:12 PM	H2 MFC set to  0.000000
11/12/2010	5:49:12 PM	BCl3 MFC set to  0.000000
11/12/2010	5:49:12 PM	PHl3 MFC set to  0.000000
11/12/2010	5:49:12 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:49:12 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:49:12 PM	Tube furnace set to 0
11/12/2010	5:50:12 PM	H2 valve closed
11/12/2010	5:50:12 PM	BCl3 valve closed
11/12/2010	5:50:12 PM	PH3 valve closed
11/12/2010	5:50:12 PM	SiCl4 pre valve closed
11/12/2010	5:50:12 PM	SiCl4 post valve closed
11/12/2010	5:50:12 PM	Bubbler valve closed
11/12/2010	5:50:12 PM	Helium valve opened
11/12/2010	5:50:12 PM	Main Vac valve opened
11/12/2010	5:50:12 PM	Bypass valve opened
11/12/2010	5:50:12 PM	Helium MFC set to  100.000000
11/12/2010	5:50:12 PM	H2 MFC set to  0.000000
11/12/2010	5:50:12 PM	BCl3 MFC set to  0.000000
11/12/2010	5:50:12 PM	PHl3 MFC set to  0.000000
11/12/2010	5:50:12 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:50:12 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:50:12 PM	Tube furnace set to 0
11/12/2010	5:51:12 PM	Helium valve closed
11/12/2010	5:51:12 PM	H2 valve closed
11/12/2010	5:51:12 PM	BCl3 valve closed
11/12/2010	5:51:12 PM	PH3 valve closed
11/12/2010	5:51:12 PM	SiCl4 pre valve closed
11/12/2010	5:51:12 PM	SiCl4 post valve closed
11/12/2010	5:51:12 PM	Bubbler valve closed
11/12/2010	5:51:12 PM	Main Vac valve opened
11/12/2010	5:51:12 PM	Bypass valve opened
11/12/2010	5:51:12 PM	Helium MFC set to  0.000000
11/12/2010	5:51:12 PM	H2 MFC set to  0.000000
11/12/2010	5:51:12 PM	BCl3 MFC set to  0.000000
11/12/2010	5:51:12 PM	PHl3 MFC set to  0.000000
11/12/2010	5:51:12 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:51:12 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:51:12 PM	Tube furnace set to 0
11/12/2010	5:52:12 PM	H2 valve closed
11/12/2010	5:52:12 PM	BCl3 valve closed
11/12/2010	5:52:12 PM	PH3 valve closed
11/12/2010	5:52:12 PM	SiCl4 pre valve closed
11/12/2010	5:52:12 PM	SiCl4 post valve closed
11/12/2010	5:52:12 PM	Bubbler valve closed
11/12/2010	5:52:12 PM	Helium valve opened
11/12/2010	5:52:12 PM	Main Vac valve opened
11/12/2010	5:52:12 PM	Bypass valve opened
11/12/2010	5:52:12 PM	Helium MFC set to  100.000000
11/12/2010	5:52:12 PM	H2 MFC set to  0.000000
11/12/2010	5:52:12 PM	BCl3 MFC set to  0.000000
11/12/2010	5:52:12 PM	PHl3 MFC set to  0.000000
11/12/2010	5:52:12 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:52:12 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:52:12 PM	Tube furnace set to 0
11/12/2010	5:53:12 PM	Helium valve closed
11/12/2010	5:53:12 PM	H2 valve closed
11/12/2010	5:53:12 PM	BCl3 valve closed
11/12/2010	5:53:12 PM	PH3 valve closed
11/12/2010	5:53:12 PM	SiCl4 pre valve closed
11/12/2010	5:53:12 PM	SiCl4 post valve closed
11/12/2010	5:53:12 PM	Bubbler valve closed
11/12/2010	5:53:12 PM	Main Vac valve opened
11/12/2010	5:53:12 PM	Bypass valve opened
11/12/2010	5:53:12 PM	Helium MFC set to  0.000000
11/12/2010	5:53:12 PM	H2 MFC set to  0.000000
11/12/2010	5:53:12 PM	BCl3 MFC set to  0.000000
11/12/2010	5:53:12 PM	PHl3 MFC set to  0.000000
11/12/2010	5:53:12 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:53:12 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:53:13 PM	Tube furnace set to 0
11/12/2010	5:54:13 PM	H2 valve closed
11/12/2010	5:54:13 PM	BCl3 valve closed
11/12/2010	5:54:13 PM	PH3 valve closed
11/12/2010	5:54:13 PM	SiCl4 pre valve closed
11/12/2010	5:54:13 PM	SiCl4 post valve closed
11/12/2010	5:54:13 PM	Bubbler valve closed
11/12/2010	5:54:13 PM	Helium valve opened
11/12/2010	5:54:13 PM	Main Vac valve opened
11/12/2010	5:54:13 PM	Bypass valve opened
11/12/2010	5:54:13 PM	Helium MFC set to  100.000000
11/12/2010	5:54:13 PM	H2 MFC set to  0.000000
11/12/2010	5:54:13 PM	BCl3 MFC set to  0.000000
11/12/2010	5:54:13 PM	PHl3 MFC set to  0.000000
11/12/2010	5:54:13 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:54:13 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:54:13 PM	Tube furnace set to 0
11/12/2010	5:55:13 PM	Helium valve closed
11/12/2010	5:55:13 PM	H2 valve closed
11/12/2010	5:55:13 PM	BCl3 valve closed
11/12/2010	5:55:13 PM	PH3 valve closed
11/12/2010	5:55:13 PM	SiCl4 pre valve closed
11/12/2010	5:55:13 PM	SiCl4 post valve closed
11/12/2010	5:55:13 PM	Bubbler valve closed
11/12/2010	5:55:13 PM	Main Vac valve opened
11/12/2010	5:55:13 PM	Bypass valve opened
11/12/2010	5:55:13 PM	Helium MFC set to  0.000000
11/12/2010	5:55:13 PM	H2 MFC set to  0.000000
11/12/2010	5:55:13 PM	BCl3 MFC set to  0.000000
11/12/2010	5:55:13 PM	PHl3 MFC set to  0.000000
11/12/2010	5:55:13 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:55:13 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:55:13 PM	Tube furnace set to 0
11/12/2010	5:56:13 PM	H2 valve closed
11/12/2010	5:56:13 PM	BCl3 valve closed
11/12/2010	5:56:13 PM	PH3 valve closed
11/12/2010	5:56:13 PM	SiCl4 pre valve closed
11/12/2010	5:56:13 PM	SiCl4 post valve closed
11/12/2010	5:56:13 PM	Bubbler valve closed
11/12/2010	5:56:13 PM	Helium valve opened
11/12/2010	5:56:13 PM	Main Vac valve opened
11/12/2010	5:56:13 PM	Bypass valve opened
11/12/2010	5:56:13 PM	Helium MFC set to  100.000000
11/12/2010	5:56:13 PM	H2 MFC set to  0.000000
11/12/2010	5:56:13 PM	BCl3 MFC set to  0.000000
11/12/2010	5:56:13 PM	PHl3 MFC set to  0.000000
11/12/2010	5:56:13 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:56:13 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:56:13 PM	Tube furnace set to 0
11/12/2010	5:57:13 PM	Helium valve closed
11/12/2010	5:57:13 PM	H2 valve closed
11/12/2010	5:57:13 PM	BCl3 valve closed
11/12/2010	5:57:13 PM	PH3 valve closed
11/12/2010	5:57:13 PM	SiCl4 pre valve closed
11/12/2010	5:57:13 PM	SiCl4 post valve closed
11/12/2010	5:57:13 PM	Bubbler valve closed
11/12/2010	5:57:13 PM	Main Vac valve opened
11/12/2010	5:57:13 PM	Bypass valve opened
11/12/2010	5:57:13 PM	Helium MFC set to  0.000000
11/12/2010	5:57:13 PM	H2 MFC set to  0.000000
11/12/2010	5:57:13 PM	BCl3 MFC set to  0.000000
11/12/2010	5:57:13 PM	PHl3 MFC set to  0.000000
11/12/2010	5:57:13 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:57:13 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:57:13 PM	Tube furnace set to 0
11/12/2010	5:57:34 PM	Run aborted at 5:57 PM
11/12/2010	5:57:34 PM	Helium valve closed
11/12/2010	5:57:34 PM	H2 valve closed
11/12/2010	5:57:34 PM	BCl3 valve closed
11/12/2010	5:57:34 PM	PH3 valve closed
11/12/2010	5:57:34 PM	SiCl4 pre valve closed
11/12/2010	5:57:34 PM	SiCl4 post valve closed
11/12/2010	5:57:34 PM	Bypass valve closed
11/12/2010	5:57:34 PM	Main Vac valve closed
11/12/2010	5:57:34 PM	Bubbler valve closed
11/12/2010	5:57:34 PM	Helium MFC set to  0.000000
11/12/2010	5:57:34 PM	H2 MFC set to  0.000000
11/12/2010	5:57:34 PM	BCl3 MFC set to  0.000000
11/12/2010	5:57:34 PM	PHl3 MFC set to  0.000000
11/12/2010	5:57:34 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:57:35 PM	Tube furnace set to 0
11/12/2010	5:57:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	5:57:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	5:57:50 PM	Recipe started at 5:57 PM
11/12/2010	5:57:50 PM	Helium valve closed
11/12/2010	5:57:50 PM	H2 valve closed
11/12/2010	5:57:50 PM	BCl3 valve closed
11/12/2010	5:57:50 PM	PH3 valve closed
11/12/2010	5:57:50 PM	SiCl4 pre valve closed
11/12/2010	5:57:50 PM	SiCl4 post valve closed
11/12/2010	5:57:50 PM	Main Vac valve closed
11/12/2010	5:57:50 PM	Bubbler valve closed
11/12/2010	5:57:50 PM	Bypass valve opened
11/12/2010	5:57:50 PM	Helium MFC set to  0.000000
11/12/2010	5:57:50 PM	H2 MFC set to  0.000000
11/12/2010	5:57:50 PM	BCl3 MFC set to  0.000000
11/12/2010	5:57:50 PM	PHl3 MFC set to  0.000000
11/12/2010	5:57:50 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:57:50 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:57:50 PM	Tube furnace set to 0
11/12/2010	5:57:50 PM	Helium valve closed
11/12/2010	5:57:50 PM	H2 valve closed
11/12/2010	5:57:50 PM	BCl3 valve closed
11/12/2010	5:57:50 PM	PH3 valve closed
11/12/2010	5:57:50 PM	SiCl4 pre valve closed
11/12/2010	5:57:50 PM	SiCl4 post valve closed
11/12/2010	5:57:50 PM	Bubbler valve closed
11/12/2010	5:57:50 PM	Main Vac valve opened
11/12/2010	5:57:50 PM	Bypass valve opened
11/12/2010	5:57:50 PM	Helium MFC set to  0.000000
11/12/2010	5:57:50 PM	H2 MFC set to  0.000000
11/12/2010	5:57:50 PM	BCl3 MFC set to  0.000000
11/12/2010	5:57:50 PM	PHl3 MFC set to  0.000000
11/12/2010	5:57:50 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:57:50 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:57:50 PM	Tube furnace set to 0
11/12/2010	5:58:50 PM	H2 valve closed
11/12/2010	5:58:50 PM	BCl3 valve closed
11/12/2010	5:58:50 PM	PH3 valve closed
11/12/2010	5:58:50 PM	SiCl4 pre valve closed
11/12/2010	5:58:50 PM	SiCl4 post valve closed
11/12/2010	5:58:50 PM	Bubbler valve closed
11/12/2010	5:58:50 PM	Helium valve opened
11/12/2010	5:58:50 PM	Main Vac valve opened
11/12/2010	5:58:50 PM	Bypass valve opened
11/12/2010	5:58:51 PM	Helium MFC set to  100.000000
11/12/2010	5:58:51 PM	H2 MFC set to  0.000000
11/12/2010	5:58:51 PM	BCl3 MFC set to  0.000000
11/12/2010	5:58:51 PM	PHl3 MFC set to  0.000000
11/12/2010	5:58:51 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:58:51 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:58:51 PM	Tube furnace set to 0
11/12/2010	5:59:51 PM	Helium valve closed
11/12/2010	5:59:51 PM	H2 valve closed
11/12/2010	5:59:51 PM	BCl3 valve closed
11/12/2010	5:59:51 PM	PH3 valve closed
11/12/2010	5:59:51 PM	SiCl4 pre valve closed
11/12/2010	5:59:51 PM	SiCl4 post valve closed
11/12/2010	5:59:51 PM	Bubbler valve closed
11/12/2010	5:59:51 PM	Main Vac valve opened
11/12/2010	5:59:51 PM	Bypass valve opened
11/12/2010	5:59:51 PM	Helium MFC set to  0.000000
11/12/2010	5:59:51 PM	H2 MFC set to  0.000000
11/12/2010	5:59:51 PM	BCl3 MFC set to  0.000000
11/12/2010	5:59:51 PM	PHl3 MFC set to  0.000000
11/12/2010	5:59:51 PM	SiCl4 MFC set to  0.000000
11/12/2010	5:59:51 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	5:59:51 PM	Tube furnace set to 0
11/12/2010	6:00:51 PM	H2 valve closed
11/12/2010	6:00:51 PM	BCl3 valve closed
11/12/2010	6:00:51 PM	PH3 valve closed
11/12/2010	6:00:51 PM	SiCl4 pre valve closed
11/12/2010	6:00:51 PM	SiCl4 post valve closed
11/12/2010	6:00:51 PM	Bubbler valve closed
11/12/2010	6:00:51 PM	Helium valve opened
11/12/2010	6:00:51 PM	Main Vac valve opened
11/12/2010	6:00:51 PM	Bypass valve opened
11/12/2010	6:00:51 PM	Helium MFC set to  100.000000
11/12/2010	6:00:51 PM	H2 MFC set to  0.000000
11/12/2010	6:00:51 PM	BCl3 MFC set to  0.000000
11/12/2010	6:00:51 PM	PHl3 MFC set to  0.000000
11/12/2010	6:00:51 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:00:51 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:00:51 PM	Tube furnace set to 0
11/12/2010	6:01:51 PM	Helium valve closed
11/12/2010	6:01:51 PM	H2 valve closed
11/12/2010	6:01:51 PM	BCl3 valve closed
11/12/2010	6:01:51 PM	PH3 valve closed
11/12/2010	6:01:51 PM	SiCl4 pre valve closed
11/12/2010	6:01:51 PM	SiCl4 post valve closed
11/12/2010	6:01:51 PM	Bubbler valve closed
11/12/2010	6:01:51 PM	Main Vac valve opened
11/12/2010	6:01:51 PM	Bypass valve opened
11/12/2010	6:01:51 PM	Helium MFC set to  0.000000
11/12/2010	6:01:51 PM	H2 MFC set to  0.000000
11/12/2010	6:01:51 PM	BCl3 MFC set to  0.000000
11/12/2010	6:01:51 PM	PHl3 MFC set to  0.000000
11/12/2010	6:01:51 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:01:51 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:01:51 PM	Tube furnace set to 0
11/12/2010	6:02:51 PM	H2 valve closed
11/12/2010	6:02:51 PM	BCl3 valve closed
11/12/2010	6:02:51 PM	PH3 valve closed
11/12/2010	6:02:51 PM	SiCl4 pre valve closed
11/12/2010	6:02:51 PM	SiCl4 post valve closed
11/12/2010	6:02:51 PM	Bubbler valve closed
11/12/2010	6:02:51 PM	Helium valve opened
11/12/2010	6:02:51 PM	Main Vac valve opened
11/12/2010	6:02:51 PM	Bypass valve opened
11/12/2010	6:02:51 PM	Helium MFC set to  100.000000
11/12/2010	6:02:51 PM	H2 MFC set to  0.000000
11/12/2010	6:02:51 PM	BCl3 MFC set to  0.000000
11/12/2010	6:02:51 PM	PHl3 MFC set to  0.000000
11/12/2010	6:02:51 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:02:51 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:02:51 PM	Tube furnace set to 0
11/12/2010	6:03:51 PM	Helium valve closed
11/12/2010	6:03:51 PM	H2 valve closed
11/12/2010	6:03:51 PM	BCl3 valve closed
11/12/2010	6:03:51 PM	PH3 valve closed
11/12/2010	6:03:51 PM	SiCl4 pre valve closed
11/12/2010	6:03:51 PM	SiCl4 post valve closed
11/12/2010	6:03:51 PM	Bubbler valve closed
11/12/2010	6:03:51 PM	Main Vac valve opened
11/12/2010	6:03:51 PM	Bypass valve opened
11/12/2010	6:03:51 PM	Helium MFC set to  0.000000
11/12/2010	6:03:51 PM	H2 MFC set to  0.000000
11/12/2010	6:03:51 PM	BCl3 MFC set to  0.000000
11/12/2010	6:03:51 PM	PHl3 MFC set to  0.000000
11/12/2010	6:03:51 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:03:51 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:03:52 PM	Tube furnace set to 0
11/12/2010	6:04:52 PM	H2 valve closed
11/12/2010	6:04:52 PM	BCl3 valve closed
11/12/2010	6:04:52 PM	PH3 valve closed
11/12/2010	6:04:52 PM	SiCl4 pre valve closed
11/12/2010	6:04:52 PM	SiCl4 post valve closed
11/12/2010	6:04:52 PM	Bubbler valve closed
11/12/2010	6:04:52 PM	Helium valve opened
11/12/2010	6:04:52 PM	Main Vac valve opened
11/12/2010	6:04:52 PM	Bypass valve opened
11/12/2010	6:04:52 PM	Helium MFC set to  100.000000
11/12/2010	6:04:52 PM	H2 MFC set to  0.000000
11/12/2010	6:04:52 PM	BCl3 MFC set to  0.000000
11/12/2010	6:04:52 PM	PHl3 MFC set to  0.000000
11/12/2010	6:04:52 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:04:52 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:04:52 PM	Tube furnace set to 0
11/12/2010	6:05:52 PM	Helium valve closed
11/12/2010	6:05:52 PM	H2 valve closed
11/12/2010	6:05:52 PM	BCl3 valve closed
11/12/2010	6:05:52 PM	PH3 valve closed
11/12/2010	6:05:52 PM	SiCl4 pre valve closed
11/12/2010	6:05:52 PM	SiCl4 post valve closed
11/12/2010	6:05:52 PM	Bubbler valve closed
11/12/2010	6:05:52 PM	Main Vac valve opened
11/12/2010	6:05:52 PM	Bypass valve opened
11/12/2010	6:05:52 PM	Helium MFC set to  0.000000
11/12/2010	6:05:52 PM	H2 MFC set to  0.000000
11/12/2010	6:05:52 PM	BCl3 MFC set to  0.000000
11/12/2010	6:05:52 PM	PHl3 MFC set to  0.000000
11/12/2010	6:05:52 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:05:52 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:05:52 PM	Tube furnace set to 0
11/12/2010	6:06:52 PM	H2 valve closed
11/12/2010	6:06:52 PM	BCl3 valve closed
11/12/2010	6:06:52 PM	PH3 valve closed
11/12/2010	6:06:52 PM	SiCl4 pre valve closed
11/12/2010	6:06:52 PM	SiCl4 post valve closed
11/12/2010	6:06:52 PM	Bubbler valve closed
11/12/2010	6:06:52 PM	Helium valve opened
11/12/2010	6:06:52 PM	Main Vac valve opened
11/12/2010	6:06:52 PM	Bypass valve opened
11/12/2010	6:06:52 PM	Helium MFC set to  100.000000
11/12/2010	6:06:52 PM	H2 MFC set to  0.000000
11/12/2010	6:06:52 PM	BCl3 MFC set to  0.000000
11/12/2010	6:06:52 PM	PHl3 MFC set to  0.000000
11/12/2010	6:06:52 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:06:52 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:06:52 PM	Tube furnace set to 0
11/12/2010	6:07:52 PM	Helium valve closed
11/12/2010	6:07:52 PM	H2 valve closed
11/12/2010	6:07:52 PM	BCl3 valve closed
11/12/2010	6:07:52 PM	PH3 valve closed
11/12/2010	6:07:52 PM	SiCl4 pre valve closed
11/12/2010	6:07:52 PM	SiCl4 post valve closed
11/12/2010	6:07:52 PM	Bubbler valve closed
11/12/2010	6:07:52 PM	Main Vac valve opened
11/12/2010	6:07:52 PM	Bypass valve opened
11/12/2010	6:07:52 PM	Helium MFC set to  0.000000
11/12/2010	6:07:52 PM	H2 MFC set to  0.000000
11/12/2010	6:07:52 PM	BCl3 MFC set to  0.000000
11/12/2010	6:07:52 PM	PHl3 MFC set to  0.000000
11/12/2010	6:07:52 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:07:52 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:07:52 PM	Tube furnace set to 0
11/12/2010	6:08:23 PM	Run aborted at 6:08 PM
11/12/2010	6:08:23 PM	Helium valve closed
11/12/2010	6:08:23 PM	H2 valve closed
11/12/2010	6:08:23 PM	BCl3 valve closed
11/12/2010	6:08:23 PM	PH3 valve closed
11/12/2010	6:08:23 PM	SiCl4 pre valve closed
11/12/2010	6:08:23 PM	SiCl4 post valve closed
11/12/2010	6:08:23 PM	Bypass valve closed
11/12/2010	6:08:23 PM	Main Vac valve closed
11/12/2010	6:08:23 PM	Bubbler valve closed
11/12/2010	6:08:23 PM	Helium MFC set to  0.000000
11/12/2010	6:08:23 PM	H2 MFC set to  0.000000
11/12/2010	6:08:23 PM	BCl3 MFC set to  0.000000
11/12/2010	6:08:23 PM	PHl3 MFC set to  0.000000
11/12/2010	6:08:23 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:08:23 PM	Tube furnace set to 0
11/12/2010	6:08:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	6:08:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2010	6:08:28 PM	Recipe started at 6:08 PM
11/12/2010	6:08:28 PM	Helium valve closed
11/12/2010	6:08:28 PM	H2 valve closed
11/12/2010	6:08:28 PM	BCl3 valve closed
11/12/2010	6:08:28 PM	PH3 valve closed
11/12/2010	6:08:28 PM	SiCl4 pre valve closed
11/12/2010	6:08:28 PM	SiCl4 post valve closed
11/12/2010	6:08:28 PM	Main Vac valve closed
11/12/2010	6:08:28 PM	Bubbler valve closed
11/12/2010	6:08:28 PM	Bypass valve opened
11/12/2010	6:08:28 PM	Helium MFC set to  0.000000
11/12/2010	6:08:28 PM	H2 MFC set to  0.000000
11/12/2010	6:08:28 PM	BCl3 MFC set to  0.000000
11/12/2010	6:08:28 PM	PHl3 MFC set to  0.000000
11/12/2010	6:08:28 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:08:28 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:08:28 PM	Tube furnace set to 0
11/12/2010	6:08:28 PM	Helium valve closed
11/12/2010	6:08:28 PM	H2 valve closed
11/12/2010	6:08:28 PM	BCl3 valve closed
11/12/2010	6:08:28 PM	PH3 valve closed
11/12/2010	6:08:28 PM	SiCl4 pre valve closed
11/12/2010	6:08:28 PM	SiCl4 post valve closed
11/12/2010	6:08:28 PM	Bubbler valve closed
11/12/2010	6:08:28 PM	Main Vac valve opened
11/12/2010	6:08:28 PM	Bypass valve opened
11/12/2010	6:08:28 PM	Helium MFC set to  0.000000
11/12/2010	6:08:28 PM	H2 MFC set to  0.000000
11/12/2010	6:08:28 PM	BCl3 MFC set to  0.000000
11/12/2010	6:08:28 PM	PHl3 MFC set to  0.000000
11/12/2010	6:08:28 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:08:28 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:08:28 PM	Tube furnace set to 0
11/12/2010	6:08:28 PM	Run finished at 6:08 PM
11/12/2010	6:08:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2010	6:08:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	6:09:00 PM	Recipe started at 6:08 PM
11/12/2010	6:09:00 PM	Helium valve closed
11/12/2010	6:09:00 PM	H2 valve closed
11/12/2010	6:09:00 PM	BCl3 valve closed
11/12/2010	6:09:00 PM	PH3 valve closed
11/12/2010	6:09:00 PM	SiCl4 pre valve closed
11/12/2010	6:09:00 PM	SiCl4 post valve closed
11/12/2010	6:09:00 PM	Main Vac valve closed
11/12/2010	6:09:00 PM	Bubbler valve closed
11/12/2010	6:09:00 PM	Bypass valve opened
11/12/2010	6:09:00 PM	Helium MFC set to  0.000000
11/12/2010	6:09:00 PM	H2 MFC set to  0.000000
11/12/2010	6:09:00 PM	BCl3 MFC set to  0.000000
11/12/2010	6:09:00 PM	PHl3 MFC set to  0.000000
11/12/2010	6:09:00 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:09:00 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:09:00 PM	Tube furnace set to 0
11/12/2010	6:09:00 PM	Helium valve closed
11/12/2010	6:09:00 PM	H2 valve closed
11/12/2010	6:09:00 PM	BCl3 valve closed
11/12/2010	6:09:00 PM	PH3 valve closed
11/12/2010	6:09:00 PM	SiCl4 pre valve closed
11/12/2010	6:09:00 PM	SiCl4 post valve closed
11/12/2010	6:09:00 PM	Bubbler valve closed
11/12/2010	6:09:00 PM	Main Vac valve opened
11/12/2010	6:09:00 PM	Bypass valve opened
11/12/2010	6:09:00 PM	Helium MFC set to  0.000000
11/12/2010	6:09:00 PM	H2 MFC set to  0.000000
11/12/2010	6:09:00 PM	BCl3 MFC set to  0.000000
11/12/2010	6:09:00 PM	PHl3 MFC set to  0.000000
11/12/2010	6:09:00 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:09:00 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:09:00 PM	Tube furnace set to 0
11/12/2010	6:10:00 PM	H2 valve closed
11/12/2010	6:10:00 PM	BCl3 valve closed
11/12/2010	6:10:00 PM	PH3 valve closed
11/12/2010	6:10:00 PM	SiCl4 pre valve closed
11/12/2010	6:10:00 PM	SiCl4 post valve closed
11/12/2010	6:10:00 PM	Bubbler valve closed
11/12/2010	6:10:00 PM	Helium valve opened
11/12/2010	6:10:00 PM	Main Vac valve opened
11/12/2010	6:10:00 PM	Bypass valve opened
11/12/2010	6:10:00 PM	Helium MFC set to  100.000000
11/12/2010	6:10:00 PM	H2 MFC set to  0.000000
11/12/2010	6:10:00 PM	BCl3 MFC set to  0.000000
11/12/2010	6:10:00 PM	PHl3 MFC set to  0.000000
11/12/2010	6:10:00 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:10:00 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:10:00 PM	Tube furnace set to 0
11/12/2010	6:11:01 PM	Helium valve closed
11/12/2010	6:11:01 PM	H2 valve closed
11/12/2010	6:11:01 PM	BCl3 valve closed
11/12/2010	6:11:01 PM	PH3 valve closed
11/12/2010	6:11:01 PM	SiCl4 pre valve closed
11/12/2010	6:11:01 PM	SiCl4 post valve closed
11/12/2010	6:11:01 PM	Bubbler valve closed
11/12/2010	6:11:01 PM	Main Vac valve opened
11/12/2010	6:11:01 PM	Bypass valve opened
11/12/2010	6:11:01 PM	Helium MFC set to  0.000000
11/12/2010	6:11:01 PM	H2 MFC set to  0.000000
11/12/2010	6:11:01 PM	BCl3 MFC set to  0.000000
11/12/2010	6:11:01 PM	PHl3 MFC set to  0.000000
11/12/2010	6:11:01 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:11:01 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:11:01 PM	Tube furnace set to 0
11/12/2010	6:12:01 PM	H2 valve closed
11/12/2010	6:12:01 PM	BCl3 valve closed
11/12/2010	6:12:01 PM	PH3 valve closed
11/12/2010	6:12:01 PM	SiCl4 pre valve closed
11/12/2010	6:12:01 PM	SiCl4 post valve closed
11/12/2010	6:12:01 PM	Bubbler valve closed
11/12/2010	6:12:01 PM	Helium valve opened
11/12/2010	6:12:01 PM	Main Vac valve opened
11/12/2010	6:12:01 PM	Bypass valve opened
11/12/2010	6:12:01 PM	Helium MFC set to  100.000000
11/12/2010	6:12:01 PM	H2 MFC set to  0.000000
11/12/2010	6:12:01 PM	BCl3 MFC set to  0.000000
11/12/2010	6:12:01 PM	PHl3 MFC set to  0.000000
11/12/2010	6:12:01 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:12:01 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:12:01 PM	Tube furnace set to 0
11/12/2010	6:13:01 PM	Helium valve closed
11/12/2010	6:13:01 PM	H2 valve closed
11/12/2010	6:13:01 PM	BCl3 valve closed
11/12/2010	6:13:01 PM	PH3 valve closed
11/12/2010	6:13:01 PM	SiCl4 pre valve closed
11/12/2010	6:13:01 PM	SiCl4 post valve closed
11/12/2010	6:13:01 PM	Bubbler valve closed
11/12/2010	6:13:01 PM	Main Vac valve opened
11/12/2010	6:13:01 PM	Bypass valve opened
11/12/2010	6:13:01 PM	Helium MFC set to  0.000000
11/12/2010	6:13:01 PM	H2 MFC set to  0.000000
11/12/2010	6:13:01 PM	BCl3 MFC set to  0.000000
11/12/2010	6:13:01 PM	PHl3 MFC set to  0.000000
11/12/2010	6:13:01 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:13:01 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:13:01 PM	Tube furnace set to 0
11/12/2010	6:14:01 PM	H2 valve closed
11/12/2010	6:14:01 PM	BCl3 valve closed
11/12/2010	6:14:01 PM	PH3 valve closed
11/12/2010	6:14:01 PM	SiCl4 pre valve closed
11/12/2010	6:14:01 PM	SiCl4 post valve closed
11/12/2010	6:14:01 PM	Bubbler valve closed
11/12/2010	6:14:01 PM	Helium valve opened
11/12/2010	6:14:01 PM	Main Vac valve opened
11/12/2010	6:14:01 PM	Bypass valve opened
11/12/2010	6:14:01 PM	Helium MFC set to  100.000000
11/12/2010	6:14:01 PM	H2 MFC set to  0.000000
11/12/2010	6:14:01 PM	BCl3 MFC set to  0.000000
11/12/2010	6:14:01 PM	PHl3 MFC set to  0.000000
11/12/2010	6:14:01 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:14:01 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:14:01 PM	Tube furnace set to 0
11/12/2010	6:15:01 PM	Helium valve closed
11/12/2010	6:15:01 PM	H2 valve closed
11/12/2010	6:15:01 PM	BCl3 valve closed
11/12/2010	6:15:01 PM	PH3 valve closed
11/12/2010	6:15:01 PM	SiCl4 pre valve closed
11/12/2010	6:15:01 PM	SiCl4 post valve closed
11/12/2010	6:15:01 PM	Bubbler valve closed
11/12/2010	6:15:01 PM	Main Vac valve opened
11/12/2010	6:15:01 PM	Bypass valve opened
11/12/2010	6:15:01 PM	Helium MFC set to  0.000000
11/12/2010	6:15:01 PM	H2 MFC set to  0.000000
11/12/2010	6:15:01 PM	BCl3 MFC set to  0.000000
11/12/2010	6:15:01 PM	PHl3 MFC set to  0.000000
11/12/2010	6:15:01 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:15:01 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:15:01 PM	Tube furnace set to 0
11/12/2010	6:16:01 PM	H2 valve closed
11/12/2010	6:16:01 PM	BCl3 valve closed
11/12/2010	6:16:01 PM	PH3 valve closed
11/12/2010	6:16:02 PM	SiCl4 pre valve closed
11/12/2010	6:16:02 PM	SiCl4 post valve closed
11/12/2010	6:16:02 PM	Bubbler valve closed
11/12/2010	6:16:02 PM	Helium valve opened
11/12/2010	6:16:02 PM	Main Vac valve opened
11/12/2010	6:16:02 PM	Bypass valve opened
11/12/2010	6:16:02 PM	Helium MFC set to  100.000000
11/12/2010	6:16:02 PM	H2 MFC set to  0.000000
11/12/2010	6:16:02 PM	BCl3 MFC set to  0.000000
11/12/2010	6:16:02 PM	PHl3 MFC set to  0.000000
11/12/2010	6:16:02 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:16:02 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:16:02 PM	Tube furnace set to 0
11/12/2010	6:17:02 PM	Helium valve closed
11/12/2010	6:17:02 PM	H2 valve closed
11/12/2010	6:17:02 PM	BCl3 valve closed
11/12/2010	6:17:02 PM	PH3 valve closed
11/12/2010	6:17:02 PM	SiCl4 pre valve closed
11/12/2010	6:17:02 PM	SiCl4 post valve closed
11/12/2010	6:17:02 PM	Bubbler valve closed
11/12/2010	6:17:02 PM	Main Vac valve opened
11/12/2010	6:17:02 PM	Bypass valve opened
11/12/2010	6:17:02 PM	Helium MFC set to  0.000000
11/12/2010	6:17:02 PM	H2 MFC set to  0.000000
11/12/2010	6:17:02 PM	BCl3 MFC set to  0.000000
11/12/2010	6:17:02 PM	PHl3 MFC set to  0.000000
11/12/2010	6:17:02 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:17:02 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:17:02 PM	Tube furnace set to 0
11/12/2010	6:17:57 PM	Run aborted at 6:17 PM
11/12/2010	6:17:57 PM	Helium valve closed
11/12/2010	6:17:57 PM	H2 valve closed
11/12/2010	6:17:57 PM	BCl3 valve closed
11/12/2010	6:17:57 PM	PH3 valve closed
11/12/2010	6:17:57 PM	SiCl4 pre valve closed
11/12/2010	6:17:57 PM	SiCl4 post valve closed
11/12/2010	6:17:57 PM	Bypass valve closed
11/12/2010	6:17:57 PM	Main Vac valve closed
11/12/2010	6:17:57 PM	Bubbler valve closed
11/12/2010	6:17:57 PM	Helium MFC set to  0.000000
11/12/2010	6:17:57 PM	H2 MFC set to  0.000000
11/12/2010	6:17:57 PM	BCl3 MFC set to  0.000000
11/12/2010	6:17:57 PM	PHl3 MFC set to  0.000000
11/12/2010	6:17:57 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:17:57 PM	Tube furnace set to 0
11/12/2010	6:17:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/12/2010	6:17:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2010	6:18:00 PM	Recipe started at 6:17 PM
11/12/2010	6:18:00 PM	Helium valve closed
11/12/2010	6:18:00 PM	H2 valve closed
11/12/2010	6:18:00 PM	BCl3 valve closed
11/12/2010	6:18:00 PM	PH3 valve closed
11/12/2010	6:18:00 PM	SiCl4 pre valve closed
11/12/2010	6:18:00 PM	SiCl4 post valve closed
11/12/2010	6:18:00 PM	Main Vac valve closed
11/12/2010	6:18:00 PM	Bubbler valve closed
11/12/2010	6:18:00 PM	Bypass valve opened
11/12/2010	6:18:00 PM	Helium MFC set to  0.000000
11/12/2010	6:18:00 PM	H2 MFC set to  0.000000
11/12/2010	6:18:00 PM	BCl3 MFC set to  0.000000
11/12/2010	6:18:00 PM	PHl3 MFC set to  0.000000
11/12/2010	6:18:00 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:18:00 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:18:00 PM	Tube furnace set to 0
11/12/2010	6:18:00 PM	Helium valve closed
11/12/2010	6:18:00 PM	H2 valve closed
11/12/2010	6:18:00 PM	BCl3 valve closed
11/12/2010	6:18:00 PM	PH3 valve closed
11/12/2010	6:18:00 PM	SiCl4 pre valve closed
11/12/2010	6:18:00 PM	SiCl4 post valve closed
11/12/2010	6:18:00 PM	Bubbler valve closed
11/12/2010	6:18:00 PM	Main Vac valve opened
11/12/2010	6:18:00 PM	Bypass valve opened
11/12/2010	6:18:00 PM	Helium MFC set to  0.000000
11/12/2010	6:18:00 PM	H2 MFC set to  0.000000
11/12/2010	6:18:00 PM	BCl3 MFC set to  0.000000
11/12/2010	6:18:00 PM	PHl3 MFC set to  0.000000
11/12/2010	6:18:00 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:18:00 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:18:00 PM	Tube furnace set to 0
11/12/2010	6:18:01 PM	Run finished at 6:18 PM
11/12/2010	6:18:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2010	6:19:20 PM	Main Vac valve closed
11/12/2010	6:19:21 PM	Bypass valve closed
11/12/2010	6:19:41 PM	Recipe started at 6:19 PM
11/12/2010	6:19:41 PM	Helium valve closed
11/12/2010	6:19:41 PM	BCl3 valve closed
11/12/2010	6:19:41 PM	PH3 valve closed
11/12/2010	6:19:41 PM	SiCl4 pre valve closed
11/12/2010	6:19:41 PM	SiCl4 post valve closed
11/12/2010	6:19:41 PM	Main Vac valve closed
11/12/2010	6:19:41 PM	Bypass valve closed
11/12/2010	6:19:41 PM	Bubbler valve closed
11/12/2010	6:19:41 PM	H2 valve opened
11/12/2010	6:19:41 PM	Helium MFC set to  0.000000
11/12/2010	6:19:41 PM	H2 MFC set to  500.000000
11/12/2010	6:19:41 PM	BCl3 MFC set to  0.000000
11/12/2010	6:19:41 PM	PHl3 MFC set to  0.000000
11/12/2010	6:19:41 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:19:41 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:19:41 PM	Tube furnace set to 0
11/12/2010	6:21:02 PM	Helium valve closed
11/12/2010	6:21:02 PM	BCl3 valve closed
11/12/2010	6:21:02 PM	PH3 valve closed
11/12/2010	6:21:02 PM	SiCl4 pre valve closed
11/12/2010	6:21:02 PM	SiCl4 post valve closed
11/12/2010	6:21:02 PM	Main Vac valve closed
11/12/2010	6:21:02 PM	Bypass valve closed
11/12/2010	6:21:02 PM	H2 valve opened
11/12/2010	6:21:02 PM	Bubbler valve opened
11/12/2010	6:21:02 PM	Helium MFC set to  0.000000
11/12/2010	6:21:02 PM	H2 MFC set to  500.000000
11/12/2010	6:21:02 PM	BCl3 MFC set to  0.000000
11/12/2010	6:21:02 PM	PHl3 MFC set to  0.000000
11/12/2010	6:21:02 PM	SiCl4 MFC set to  0.000000
11/12/2010	6:21:02 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:21:02 PM	Tube furnace set to 1000
11/12/2010	6:41:02 PM	Helium valve closed
11/12/2010	6:41:02 PM	BCl3 valve closed
11/12/2010	6:41:02 PM	Main Vac valve closed
11/12/2010	6:41:02 PM	Bypass valve closed
11/12/2010	6:41:02 PM	H2 valve opened
11/12/2010	6:41:02 PM	PH3 valve opened
11/12/2010	6:41:02 PM	SiCl4 pre valve opened
11/12/2010	6:41:02 PM	SiCl4 post valve opened
11/12/2010	6:41:02 PM	Bubbler valve opened
11/12/2010	6:41:02 PM	Helium MFC set to  0.000000
11/12/2010	6:41:02 PM	H2 MFC set to  500.000000
11/12/2010	6:41:02 PM	BCl3 MFC set to  0.000000
11/12/2010	6:41:02 PM	PHl3 MFC set to  1.000000
11/12/2010	6:41:02 PM	SiCl4 MFC set to  50.000000
11/12/2010	6:41:02 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	6:41:02 PM	Tube furnace set to 1000
11/12/2010	7:11:02 PM	H2 valve closed
11/12/2010	7:11:03 PM	BCl3 valve closed
11/12/2010	7:11:03 PM	PH3 valve closed
11/12/2010	7:11:03 PM	SiCl4 pre valve closed
11/12/2010	7:11:03 PM	SiCl4 post valve closed
11/12/2010	7:11:03 PM	Main Vac valve closed
11/12/2010	7:11:03 PM	Bypass valve closed
11/12/2010	7:11:03 PM	Helium valve opened
11/12/2010	7:11:03 PM	Bubbler valve opened
11/12/2010	7:11:03 PM	Helium MFC set to  500.000000
11/12/2010	7:11:03 PM	H2 MFC set to  0.000000
11/12/2010	7:11:03 PM	BCl3 MFC set to  0.000000
11/12/2010	7:11:03 PM	PHl3 MFC set to  0.000000
11/12/2010	7:11:03 PM	SiCl4 MFC set to  0.000000
11/12/2010	7:11:03 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	7:11:03 PM	Tube furnace set to 0
11/12/2010	7:31:03 PM	Helium valve closed
11/12/2010	7:31:03 PM	H2 valve closed
11/12/2010	7:31:03 PM	BCl3 valve closed
11/12/2010	7:31:03 PM	PH3 valve closed
11/12/2010	7:31:03 PM	SiCl4 pre valve closed
11/12/2010	7:31:03 PM	SiCl4 post valve closed
11/12/2010	7:31:03 PM	Main Vac valve closed
11/12/2010	7:31:03 PM	Bypass valve closed
11/12/2010	7:31:03 PM	Bubbler valve closed
11/12/2010	7:31:03 PM	Helium MFC set to  0.000000
11/12/2010	7:31:03 PM	H2 MFC set to  0.000000
11/12/2010	7:31:03 PM	BCl3 MFC set to  0.000000
11/12/2010	7:31:03 PM	PHl3 MFC set to  0.000000
11/12/2010	7:31:03 PM	SiCl4 MFC set to  0.000000
11/12/2010	7:31:03 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	7:31:03 PM	Tube furnace set to 0
11/12/2010	7:31:03 PM	Run finished at 7:31 PM
11/12/2010	7:45:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2010	7:45:12 PM	Recipe started at 7:45 PM
11/12/2010	7:45:12 PM	Helium valve closed
11/12/2010	7:45:12 PM	H2 valve closed
11/12/2010	7:45:12 PM	BCl3 valve closed
11/12/2010	7:45:12 PM	PH3 valve closed
11/12/2010	7:45:12 PM	SiCl4 pre valve closed
11/12/2010	7:45:12 PM	SiCl4 post valve closed
11/12/2010	7:45:12 PM	Main Vac valve closed
11/12/2010	7:45:12 PM	Bubbler valve closed
11/12/2010	7:45:12 PM	Bypass valve opened
11/12/2010	7:45:12 PM	Helium MFC set to  0.000000
11/12/2010	7:45:12 PM	H2 MFC set to  0.000000
11/12/2010	7:45:12 PM	BCl3 MFC set to  0.000000
11/12/2010	7:45:12 PM	PHl3 MFC set to  0.000000
11/12/2010	7:45:12 PM	SiCl4 MFC set to  0.000000
11/12/2010	7:45:12 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	7:45:12 PM	Tube furnace set to 0
11/12/2010	7:46:06 PM	Helium valve closed
11/12/2010	7:46:06 PM	H2 valve closed
11/12/2010	7:46:06 PM	BCl3 valve closed
11/12/2010	7:46:06 PM	PH3 valve closed
11/12/2010	7:46:06 PM	SiCl4 pre valve closed
11/12/2010	7:46:06 PM	SiCl4 post valve closed
11/12/2010	7:46:06 PM	Bubbler valve closed
11/12/2010	7:46:06 PM	Main Vac valve opened
11/12/2010	7:46:06 PM	Bypass valve opened
11/12/2010	7:46:06 PM	Helium MFC set to  0.000000
11/12/2010	7:46:06 PM	H2 MFC set to  0.000000
11/12/2010	7:46:06 PM	BCl3 MFC set to  0.000000
11/12/2010	7:46:06 PM	PHl3 MFC set to  0.000000
11/12/2010	7:46:06 PM	SiCl4 MFC set to  0.000000
11/12/2010	7:46:06 PM	Bypass solenoid MFC set to  0.000000
11/12/2010	7:46:07 PM	Tube furnace set to 0
11/12/2010	7:46:07 PM	Run finished at 7:46 PM
11/12/2010	7:46:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
